61 results about "Surface potential measurement" patented technology

An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

The invention discloses a measuring device and method for a trap parameter of solid dielectric. The solid dielectric material is charged by using a three-electrode corona discharge system; a material sample to be tested is placed below a single-needle electrode and a metal mesh electrode; the sample is adhered to a metal disc electrode through conductive silicone grease and is charged by the three-electrode system; after charging is ended, an external voltage is removed, and short circuit discharge is performed to remove surface free loads; surface potential of the measured sample is attenuated; and the trap energy level and the trap density parameter of the material can be calculated through a signal conditioning circuit and a data acquisition system. The measuring device comprises a constant temperature box, the three-electrode coronate charging system, a surface potential measuring system, a sample preheating system, a rotary electrode and a temperature and humidity control system. The invention provides an effective analysis means for research in representation of an aging condition of a polymer insulating material and an aging rule of polymer by the trap parameter and research in aspects such as a solid dielectric surface electrification phenomenon and surface flashover performance influence.

A inspecting and measurement method and inspecting and measurement apparatus for semiconductor devices and patterns such as photomasks using an electron beam which can measure the charged potential of a sample with higher precision than in the prior art, and a inspecting and measurement apparatus which can measure charged potential by means of a simple construction. When an S curve is observed in a semiconductor device to be inspectioned and measured, fluctuations of the charged potential of the inspection sample surface are suppressed by optimizing the energy of a primary electron beam used for irradiation. When the surface potential of the semiconductor device is measured, a more precise potential measurement than that of the prior art can be performed which is almost unaffected by the charged potential of an insulation film surface. Further, the surface potential can be measured without installing a special apparatus for wafer surface potential measurement such as an energy filter, so the cost of the apparatus can be reduced.

In a plasma processing apparatus, a member for propagating high frequency from a high frequency power supply and / or to which the high frequency is applied. A power feed rod is electromagnetically shielded between a matching unit and a bottom plate of a chamber by a coaxial cylindrical conductor connected to a ground potential. A surface potential system disposed in an appropriate distance from the power feed rod in radius direction is installed in the cylindrical conductor, and measures in a non-contact state the electrostatic surface potential of the power feed rod through electrostatic capacitance and provides a controller with a surface potential detection signal including surface potential measurement value information. The controller performs a required signal processing or operation processing on the basis of the surface potential detection signal from the surface potential system, thereby obtaining the measurement value of the DC potential on the power feed rod.

The invention discloses a measurement system and a measurement method of a secondary electron emission yield of dielectric material. The measurement system comprises a Faraday cup and a pulse electron gun, wherein an incident beam generated by the pulse electron gun outside the Faraday cup irradiates on a sample through an electronic entrance port on a tube, and an automatic voltage regulator circuit is electrically connected between a sample back electrode and an earth wire, so that the level on the sample surface is kept constant relative to a potential difference between the electron guns. The voltage regulating range of the voltage adjustor circuit is controlled by a feedback control circuit in real time, so as to ensure that charging potential of the sample is compensated in real time, and current probes for measuring net collection current and secondary electron current are respectively connected between the sample and a voltage controlled power source of the voltage regulator circuit, and connected with the Faraday cup. According to the measurement system and the method disclosed by the invention, are simple extra consumer power equipment such as an ion source and the like and related experimental links are not needed, the measurement efficiency is high, and the measurement is continuous without stopping to carry out work such as energy dissipation, surface level measurement and the like after each irradiation pulse, and the measurement error is small.

The invention discloses a testing device and method for electrostatic discharge of a spacecraft dielectric material. According to the device and method, an electron accelerator and an electron gun are utilized for obtaining a high-energy electron and low-energy electron mixed irradiation environment, electrostatic discharge pulses of the dielectric material under the irradiation of a high-energy and low-energy combination environment are tested, and meanwhile the surface potential of the dielectric material under the irradiation of the high-energy and low-energy combination environment is measured. The device mainly comprises the electron accelerator, the electron gun, a vacuum pumping system, a dielectric material sample, a sample surface potential measuring device and an oscilloscope. The device can be used for testing the electrostatic discharge pulses of the dielectric material under the combined irradiation of the high-energy and low-energy environment, and an important basis is provided for researching the relationship between electrostatic discharge of the dielectric material and the space environment.

The invention discloses a GIL (gas insulated metal enclosed transmission line) epoxy resin surface charge measuring device and method. The device comprises a high-voltage charging device and a potential measurement device; different types of voltage actions are exerted on the GIL epoxy resin surface to be measured; a voltage boosting process is corona discharge; the charge trapping and trapping-out states are calculated; the specimen surface potential dissipation curves, different position potential distribution curves and the specimen trap energy level density distribution curves after the action by different types of corona are drawn; a GIL epoxy resin surface charge measuring result is obtained; the charge transportation characteristics are analyzed; the aging state and the service life of epoxy resin are accurately judged. By using a surface potential measuring technology and the existing instruments, the epoxy resin specimen surface charges under the actions of different voltage types are measured; the measuring data is subjected to mathematical processing; the transportation characteristics of the charges inside the epoxy resin are found out; the important theoretical basis is provided for solving the epoxy insulator surface flashover problem and the aging state evaluation problem; typical engineering practical guiding significance is realized.

An inspection and measurement method and apparatus for semiconductor devices and patterns such as photomasks using an electron beam capable of measuring the potential of a sample with higher precision than conventional systems. When an S curve is observed in a semiconductor device to be inspected, fluctuations of the potential of the inspection sample surface are suppressed by optimizing the energy of a primary electron beam used for irradiation. When the surface potential of the semiconductor device is measured, a more precise measurement can be obtained without adverse effects from an insulation film surface. Further, the surface potential can be measured without installing a special apparatus for wafer surface potential measurement such as an energy filter, so the cost of the apparatus can be reduced.

The invention discloses a GIS epoxy resin surface charge characteristic and trap energy level distribution representing device and method. The device comprises a high voltage charging device and a potential measuring device. Different types of voltage are applied to the surface of epoxy resin, wherein the applying process is corona discharge. The release time of charges and the potential dissipation process in an epoxy resin insulator trap are calculated. A tdV / dt curve is drawn by analyzing and calculating the measured potential dissipation process to represent the dynamic characteristic of charges on the surface of the epoxy resin insulator and the trap energy level distribution. According to the invention, a surface potential measurement technology and the existing instrument are used to measure the surface charges of an epoxy resin sample under different voltage types; the measurement data are processed mathematically to clarify the transport characteristic of the charges inside the epoxy resin; and the device and the method provide an important theoretical basis for solving the problem of flashover of the epoxy insulator surface and evaluating the aging state, and have the typical guiding significance of engineering practice.

A system and method is disclosed for obtaining measurements of the electric fields around skin wounds and lesions on mammals noninvasively. The system and method is comprised of a vibrating metallic probe tip that is placed close to the skin in the air. By applying a series of known voltages to the metal probe tip or to the skin beneath it, the skin's local surface potential can be measured and the lateral electric field can be calculated from the spatial distribution of surface potential measurements. Surface artifacts that can affect the measurements are removed and active feedback is used to maintain a constant distance between the probe and the skin surface.

The invention relates to an oil paper insulation surface charge measurement device, which comprises a supporting mechanism, a charge injection mechanism and a surface potential measurement mechanism, wherein the supporting mechanism is an engineering insulation and comprises a platform for placing a to-be-measured oil paper insulation and a support arranged above the platform, and is provided with a mobile sample loading table; one end of an output power supply is connected with a needle electrode via a wire, and the other end is grounded via the wire; the needle electrode is fixed on the support and a preset distance is kept with the to-be-measured oil paper insulation; an earthing electrode is arranged at the lower side of the oil paper insulation and is grounded via a wire; one end of a surface potentiometer is connected with a detection probe and the other end is connected with a data collector; the detection probe is fixed on the support and a preset distance is kept with the to-be-measured oil paper insulation. Through using the oil paper insulation surface charge measurement device, a test sample can be moved quickly, surface voltage and surface charge change features of the insulation oil paper in various voltage conditions can be quickly and conveniently detected, and the charge transport features are understood more profoundly.

The invention relates to a method for measuring surface potential by using an electrostatic force microscope. The method solves the problem that Kelvin microscope surface potential measurement range is limited. The method includes: adjusting the electrostatic force microscope to enable the electrostatic force microscope to be operated at electrostatic force phase difference imaging state; selecting a position point to be detected, and scanning the position point to be detected; adjusting pinpoint voltage VEFM value of a microscope conducting probe, and enabling the voltage VEFM value to be changed within a range from -12V to +12V; recording the pinpoint voltage VEFM value and phase difference delta theta obtained through measurement; storing all recorded data as measuring data; performing curve fitting according to the measuring data; and building relation between the pinpoint voltage VEFM value of the microscope conducting probe and the phase difference delta theta according to a curve obtained through fitting. The pinpoint voltage VEFM value of the microscope conducting probe serves as the surface potential of the measured position when the phase difference delta theta obtained according to the relation is minimum. The method for measuring the surface potential by using the electrostatic force microscope can be widely applied to micro-nano scale range surface potential measurement.

An image forming apparatus includes: an imaging device that forms a toner image based on image data and transfers the toner image to a recording medium; a fixing device including a pair of rotatable members that defines a contact pressing portion that allows the recording medium with the toner image to pass through, and heats and presses the recording medium with the toner image; a surface potential measuring device that measures a surface potential of at least one of the pair of rotatable members; and a controller that performs control to give an alert notification that at least one of the pair of rotatable members which contacts with the toner image to be fixed should be replaced, when a result of the surface potential measured by the surface potential measuring device has exceeded a predetermined value.

The invention belongs to the technical field of high voltage equipment, and discloses an insulator surface potential measuring system and a measuring method based on a multi-sensor system. An insulator rotating unit and a probe three-dimensional moving unit are arranged inside a gas-tight box body; the gas-tight box body is filled with a gas simulating the true working condition of the insulator;the insulator rotating unit makes the insulator complete the rotation; the probe three-dimensional moving unit enables an electrostatic probe to complete two-dimensional translation and rotation in avertical plane; an electrometer reads the surface potential data of the insulator through the electrostatic probe and uploads the data to an upper computer for storage; and thus, insulator surface potential measurement is completed. Two kinds of translation and one kind of rotation of the electrostatic probe and one kind of rotation of the insulator can be realized, the measurement process is multi-dimensional and the space is controllable; the electrostatic probe and the insulator can be precisely controlled, and the measurement result has a high spatial resolution; and the gas pressure and voltage working environment of a real gas-sealed insulator can be simulated at the same time, and the measurement result is close to the real situation.

The invention relates to an oil paper insulator surface charge measuring apparatus and a measuring method thereof. The oil paper insulator surface charge measuring apparatus comprises a support mechanism, a charge injection mechanism and a surface potential measuring mechanism. An output power supply of the charge injection mechanism can output a plurality of types of voltages. In usage, a to-be-tested oil-paper insulator is placed on a platform and under a pin electrode; the type of the output voltage is adjusted to conduct corona charging; the output voltage of the output power supply is adjusted to zero immediately after the charging is finished; the oil-paper insulator after charging is moved to be below a detection probe on the other side of the platform; and a surface voltage value of the oil-paper insulator changing with time after the charging is measured by the surface potential measuring mechanism. By using the oil paper insulator surface charge measuring apparatus, it is possible to easily and quickly detect variation characteristics of the surface voltages and surface charges of insulators under various voltage conditions and have a deeper understanding of charge transport characteristics.

A static electricity removal device that removes static electricity by supplying positive and negative ions to a target of static electricity removal, comprising a surface potential measuring probe that measures a surface potential of the target of static electricity removal, wherein a potential detector (11a) that constitutes a surface potential measuring probe (11) and a conductive cap (13) placed so as to surround the potential detector (11a) in a non-contact state are provided and a potential generated in the cap (13) by charges of a target of static electricity removal (30) or ions supplied from a static electricity removal device (20) is detected by the potential detector (11a) and sent out to a control circuit (24) within the static electricity removal device (20) as a feedback signal. According to the present invention, a remarkably simple configuration makes it possible to detect an ion balance and a charged potential of the target of static electricity removal, thereby contributing to improvement in static electricity removal performance of an ionizer.

The invention discloses a gas-solid discharge along surface test streamer monitoring and surface potential measuring system. The system includes a hermetic can body, a motion control system, a streamer development monitoring system and a surface potential measuring system. The motion control system is disposed inside the hermetic can body. The motion control system is used for measuring the potential on a lower surface of an electrode structure and monitoring the along surface streamer development. The streamer development monitoring system is used for capturing photons emitted by a streamer head portion of the electrode structure, monitoring the moment when the streamer head portion arrives at a designated position so as to generate the development process of discharge along surface. The surface potential measuring system is intended for measuring the potential of the surface of a solid insulated medium in the electrode structure and acquiring the distribution pattern of surface charges. According to the invention, the system addresses the problem of dynamic seal, can achieve the measurement of the potential of the lower surface of the electrode structure, can monitor dynamic characteristics and static characteristics of discharge along surface, and is conducive to the analysis of pattern of how surface charges influence the insulated medium as well as the mechanism of action.

A non-contact method of measuring the thickness of an insulator film on a semiconductor substrate includes: (i) charging the insulator film surface in a non-contact manner; (ii) obtaining a first flat band voltage by conducting, prior to the charging processing step, a C-V measurement on the semiconductor substrate; obtaining a second flat band voltage by conducting, after the charging processing step, a C-V measurement on the semiconductor substrate; and calculating, based on a difference between the first and second flat band voltages, the charge amount given to the insulator film surface by the charging processing step; (iii) then measuring the insulator film surface potential and (iv) calculating the insulator film thickness based on the charge amount measured at the charge amount measuring step and on the surface potential measured at the surface potential measuring step.

The invention discloses an integrated measuring device for surface dielectric properties of solid insulating materials. The device includes a secondary electronic measurement module, a sample stage module, a corona charging module, a surface potential measurement module and a vacuum / high pressure system; the secondary electronic measurement module includes an electronic gun and a collector; the electronic gun is arranged right above the collector, and the central axes of the electronic gun and the collector are on a same straight line; the sample stage module is provided with a sample flatform, and the bottom surface of the sample flatform is provided with sliding tracks in X, Y and Z axis directions; the corona charging module includes a high voltage electrode and a corona needle, and thehigh voltage electrode is connected to the corona needle; the surface potential measurement module includes a high voltage interface and a static probe, and the static probe is connected to the highvoltage interface; and the vacuum / high pressure system includes an outer cavity body, a gas interface, a vacuum interface, a gas cylinder and a vacuum pump, the gas interface and the vacuum interfaceare arranged on the wall of the outer cavity body and communicate with the outer cavity body, the gas cylinder is connected to the gas interface, and the vacuum pump is connected to the vacuum interface.

The present invention provides a hand-held, noninvasive diagnostic device for measuring the electric fields in mammalian skin and other epithelial structures. The device includes an outer housing that contacts the skin, providing stability and allowing the device to move along with minor movement of the skin. Recessed within the outer housing is a probe that acts as a sensor to measure the electric field in the skin through an aperture in the bottom surface of the outer housing. By applying a series of known voltages while the probe is vibrating, the skin's local surface potential can be measured and the lateral electric field can be calculated from the spatial distribution of surface potential measurements. Active feedback is used to maintain a constant distance between the probe and the skin surface.

The invention discloses measuring equipment for surface potential of a film material. The measuring equipment comprises a test box used for providing vacuum conditions for measurement and injecting various gases required for measurement; a heating platform arranged inside the test box and used for providing required temperature conditions for measurement; a ground electrode which is located abovethe heating platform and is in close contact with the heating platform; a pin electrode and a grid electrode arranged inside the test box; an electrostatic probe arranged inside the test box and usedfor measurement of the surface potential of the to-be-measured film material which is charged and located above the ground electrode; the grid electrode is located between the pin electrode and the ground electrode, the pin electrode is connected to a first high voltage power source, and the grid electrode is connected to a second high voltage power source. The measuring equipment has reasonable design, easy manufacture, convenient use and simple principle and can achieve measurement experiments under different temperatures and different atmospheres, and the reliability of measurement resultscan be ensured.

A system for voltage measurement of dielectric material in plasma includes a vacuum chamber. The system also includes an electrostatic receiver located outside of the vacuum chamber. The system also includes a conductive probe having a first terminus in contact with the dielectric material in the vacuum chamber and a second terminus in electrical communication with the electrostatic receiver. The system also includes a non-contact electrostatic voltmeter configured to measure a floating potential of the electrostatic receiver that corresponds to a dielectric potential of the dielectric material at a location in contact with the first terminus of the conductive probe.

The present invention provides a hand-held, noninvasive diagnostic device for measuring the electric fields in mammalian skin and other epithelial structures. The device includes an outer housing that contacts the skin, providing stability and allowing the device to move along with minor movement of the skin. Recessed within the outer housing is a probe that acts as a sensor to measure the electric field in the skin through an aperture in the bottom surface of the outer housing. By applying a series of known voltages while the probe is vibrating, the skin's local surface potential can be measured and the lateral electric field can be calculated from the spatial distribution of surface potential measurements. Active feedback is used to maintain a constant distance between the probe and the skin surface.

The present invention provides a pattern inspection technique that enables measurement and inspection of a fine pattern by a charged particle beam to be performed with high throughput. A metrology system of fine pattern according to the pattern inspection technique has: a the column that includes a charged particle source, an electron optics for scanning a desired observation area on a sample with a charged particle beam emitted from the charged particle source, and a detector for detecting charged particles generated secondarily from the sample scanned by the charged particle beam; information processing means for measuring information about geometry of a pattern formed on the sample based on information on the intensity of the charged particles obtained by the detector; and a sample introduction unit for introducing the sample into the inside of the column; wherein a charge neutralizer unit for generating ions and charge neutralizing the sample with the ions and surface potential measuring means for measuring a surface potential of the sample surface are provided on a path that is inside the sample introduction unit and transports the sample to the column.

The invention discloses a non-intrusive surface potential measuring device for surface flashover. The device comprises a test cavity, a flashover initiation device, a surface potential measurement device and a signal acquisition and analysis device, the flashover initiation device and the surface potential measurement device are arranged in the test cavity and are respectively arranged at two sides of a sample to be tested, and the signal acquisition and analysis device is arranged outside the test cavity and is connected with the surface potential measurement device. According to the invention, flashover initiation and surface potential measurement are synchronously carried out under the condition of the controllable temperature, humidity and vacuum degree, the defect that traditional surface potential measurement can only work after flashover is finished is overcome, research on the surface charge accumulation characteristic in the pressurization stage before flashover and the surface charge dynamic characteristic in the flashover period can be achieved by analyzing the surface potential measurement result, and support is provided for evaluation of the dielectric flashover resistance in the future.

The present invention provides a hand-held, noninvasive diagnostic device for measuring the electric fields in mammalian skin and other epithelial structures. The device includes an outer housing that contacts the skin, providing stability and allowing the device to move along with minor movement of the skin. Recessed within the outer housing is a probe that acts as a sensor to measure the electric field in the skin through an aperture in the bottom surface of the outer housing. By applying a series of known voltages while the probe is vibrating, the skin's local surface potential can be measured and the lateral electric field can be calculated from the spatial distribution of surface potential measurements. Active feedback is used to maintain a constant distance between the probe and the skin surface.

The invention discloses a method for studying a mechanism of a resistive random access memory, which comprises the steps of A, providing an active layer material used in the resistive random access memory, and fabricating the active layer material into a thin film on a substrate; B, adjusting an AFM to a contact mode, and performing carrier injection on the surface of th thin film by using a conductive atomic force probe so as to form a carrier injection region; C, switching the AFM to a surface potential measurement mode in situ, performing continuous scanning on a region containing the carrier injection region in a protective atmosphere to obtain a surface potential diagram of the scanning region, and evaluating the capacity of carriers in the active layer material according to the surface potential diagram. The injection, migration and retention ability of the carriers in the active material is evaluated based on in-situ carrier injection and continuous scanning, thus whether a resistance change is caused by the capture / release of charge by the active layer or not can be judged, and the detection result is accurate and reliable.

The invention discloses an oil-paper insulation surface charge measuring device based on DC superimposed harmonics. The device is mainly composed of a charge injection device, a surface potential measuring device and a temperature control device. The charge injection device comprises a DC power source, a harmonic power source and a voltage recombination unit. The output end of the DC power sourceand the output end of the harmonic power source are connected to the input end of the voltage recombination unit. The temperature control device is mainly composed of a microprocessor constant-temperature preheating platform. An oil-paper insulation surface charge measuring method based on DC superimposed harmonics is also disclosed. The device and method are safe and reliable in experiments, stable in output voltage and flexible in regulation, can accurately simulate the actual working condition of the valve-side sleeve of a converter transformer, and provide an efficient experimental platform and method for the study of the oil charge insulation characteristics, the breakdown mechanism and the degradation mechanism.

The invention discloses a Kelvin probe force microscope measurement method based on a T-shaped cantilever beam probe, and belongs to the technical field of atomic force microscope measurement. Aimingat the problem that the accuracy of a surface potential measurement result is influenced due to a serious cantilever homogenization effect in the existing AM-KPFM measurement, the method comprises thefollowing steps of carrying out mechanical excitation on the T-shaped cantilever beam probe under a first-order bending resonance frequency to enable the T-shaped cantilever beam probe to vibrate under a preset normal amplitude; approaching a sample to be detected, and attenuating the normal amplitude of the T-shaped cantilever beam probe to a normal amplitude set value; applying an alternating voltage and a direct current compensation voltage with the frequency being the first-order torsional resonance frequency of the T-shaped cantilever beam probe between the T-shaped cantilever beam probeand the sample to be detected; obtaining a relation curve of the direct current compensation voltage and the torsional amplitude of the T-shaped cantilever beam probe; determining a torsional amplitude set value; an on the basis, measuring the to-be-measured sample according to a set scanning step pitch and the scanning test point number. The method is used for measuring the surface morphology and the local surface potential of the sample.

An image forming apparatus includes: an imaging device that forms a toner image based on image data and transfers the toner image to a recording medium; a fixing device including a pair of rotatable members that defines a contact pressing portion that allows the recording medium with the toner image to pass through, and heats and presses the recording medium with the toner image; a surface potential measuring device that measures a surface potential of at least one of the pair of rotatable members; and a controller that performs control to give an alert notification that at least one of the pair of rotatable members which contacts with the toner image to be fixed should be replaced, when a result of the surface potential measured by the surface potential measuring device has exceeded a predetermined value.