Kelvin probe force microscope measurement method based on T-shaped cantilever beam probe

A Kelvin probe force, cantilever beam probe technology, applied in scanning probe microscopy, measuring devices, scanning probe technology, etc., can solve the problems affecting the accuracy of surface potential measurement results, and achieve suppression of homogenization effects , the effect of high practical value

Active Publication Date: 2020-03-24
HARBIN INST OF TECH
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Problems solved by technology

[0003] In view of the serious cantilever homogenization effect in the AM-KPFM measurement of the normal signal of the existing rectangular beam probe, which affects the accuracy of the surface potential measurement result, the present invention provides a Kelvin probe based on a T-shaped cantilever beam probe Force microscope measurement method

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  • Kelvin probe force microscope measurement method based on T-shaped cantilever beam probe
  • Kelvin probe force microscope measurement method based on T-shaped cantilever beam probe
  • Kelvin probe force microscope measurement method based on T-shaped cantilever beam probe

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specific Embodiment approach 1

[0043] Specific implementation mode 1. Combination Figure 1 to Figure 7 Shown, the present invention provides a kind of Kelvin probe force microscope measurement method based on T-shaped cantilever beam probe, comprises the following steps:

[0044] Mechanically excite the T-shaped cantilever beam probe at the first-order bending resonance frequency to make it vibrate at the preset normal amplitude; gradually approach the sample to be tested until the normal amplitude of the T-shaped cantilever beam probe decays to the normal direction Amplitude setting value;

[0045] Then between the T-shaped cantilever beam probe and the sample to be tested, apply the AC voltage and the DC compensation voltage whose frequency is the first-order torsional resonance frequency of the T-shaped cantilever beam probe; change the size of the DC compensation voltage to obtain the DC compensation voltage and the T-shaped The relationship curve of the torsional amplitude of the cantilever beam prob...

specific Embodiment

[0088] Specific embodiment: Utilize the method of the present invention to measure the tobacco mosaic virus sample with nanoscale diameter; Figure 8 is the scanned surface topography of the tobacco mosaic virus sample, and the protruding linear part in the figure is the tobacco mosaic virus; Figure 9 is corresponding Figure 8 The profile line diagram of the marked line, the result shows that its height is 20nm; Figure 10 is the scanning surface potential difference map of the tobacco mosaic virus sample; Figure 11 is corresponding Figure 10 The statistical distribution of the data in and the bimodal fitting results show that the potential difference between the tobacco mosaic virus sample and the substrate is 94.1mV, the scanning range is 0.75μm*0.75μm, and the number of scanning points is 150*150.

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Abstract

The invention discloses a Kelvin probe force microscope measurement method based on a T-shaped cantilever beam probe, and belongs to the technical field of atomic force microscope measurement. Aimingat the problem that the accuracy of a surface potential measurement result is influenced due to a serious cantilever homogenization effect in the existing AM-KPFM measurement, the method comprises thefollowing steps of carrying out mechanical excitation on the T-shaped cantilever beam probe under a first-order bending resonance frequency to enable the T-shaped cantilever beam probe to vibrate under a preset normal amplitude; approaching a sample to be detected, and attenuating the normal amplitude of the T-shaped cantilever beam probe to a normal amplitude set value; applying an alternating voltage and a direct current compensation voltage with the frequency being the first-order torsional resonance frequency of the T-shaped cantilever beam probe between the T-shaped cantilever beam probeand the sample to be detected; obtaining a relation curve of the direct current compensation voltage and the torsional amplitude of the T-shaped cantilever beam probe; determining a torsional amplitude set value; an on the basis, measuring the to-be-measured sample according to a set scanning step pitch and the scanning test point number. The method is used for measuring the surface morphology and the local surface potential of the sample.

Description

technical field [0001] The invention relates to a Kelvin probe force microscope measurement method based on a T-shaped cantilever beam probe, and belongs to the technical field of atomic force microscope measurement. Background technique [0002] Kelvin probe force microscopy (KPFM) is a member of the scanning probe microscopy (SPM) family, which combines Kelvin technology with atomic force microscopy (AFM) to achieve Characterization of sample surface potential and surface topography. According to different detection methods, KPFM can be divided into two working modes: amplitude modulation mode (Amplitude modulation, AM) and frequency modulation mode (Frequency modulation, FM), where AM-KPFM and FM-KPFM are based on electrostatic force and electrostatic force gradient respectively. detected. Although the existing AM-KPFM mode based on the normal signal of the rectangular beam probe can measure the surface potential of the sample, in the AM-KPFM measurement based on the no...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/26G01Q60/38
CPCG01Q60/26G01Q60/38
Inventor 谢晖张号宋健民孟祥和耿俊媛
Owner HARBIN INST OF TECH
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