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Method for measuring surface potential by using electrostatic force microscope

A technology for measuring surfaces and microscopes, applied in measuring devices, scanning probe microscopy, instruments, etc., can solve the problem of limited measurement range of Kelvin microscope surface potential and achieve the effect of reducing drift

Inactive Publication Date: 2013-03-20
HARBIN UNIV OF SCI & TECH
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  • Description
  • Claims
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Problems solved by technology

[0003] In order to solve the problem of limited measurement range of surface potential of Kelvin microscope, the present invention provides a method for measuring surface potential by electrostatic force microscope

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  • Method for measuring surface potential by using electrostatic force microscope
  • Method for measuring surface potential by using electrostatic force microscope
  • Method for measuring surface potential by using electrostatic force microscope

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specific Embodiment approach 1

[0021] Specific implementation mode 1. Combination figure 1 This specific embodiment will be described. This specific implementation mode is:

[0022] Step 1: Adjust the electrostatic force microscope to make the electrostatic force microscope work normally in its electrostatic force phase contrast imaging state;

[0023] Step 2: Select the location point to be measured, and scan the location point to be measured;

[0024] Step 3: During the scanning process, adjust the microscope conductive probe tip voltage V EFM value, making it change in the range of -12V~+12V;

[0025] During each adjustment of the tip voltage V EFM value, record the tip voltage V EFM value and the phase difference Δθ obtained by measurement; the phase difference Δθ is the difference between the actual vibration phase of the microscope conductive probe and the free vibration phase; all the recorded data are stored as measurement data;

[0026] Step 4: Carry out curve fitting according to the measure...

specific Embodiment approach 2

[0033] Embodiment 2. The difference between this embodiment and Embodiment 1 is that before scanning the position to be measured described in step 2, the height of the object is first detected by tapping mode, and the microscope conductive probe is adjusted according to the detection result. Keep the distance Z between the conductive probe and the measured position point.

specific Embodiment approach 3

[0034] Embodiment 3. This embodiment is different from Embodiment 1 and Embodiment 2 in that the distance Z is 10-200 nm.

[0035] Since the conductive probe of the microscope keeps a distance Z from the measured position and scans according to the surface fluctuation of the measured object, the conductive probe of the microscope does not touch the surface of the measured object during the second scanning process, and there is no contact between the conductive probe of the microscope and the measured object. The short-range repulsion of atoms between the surface of the object, and maintain a constant distance from the surface of the measured object, eliminating the influence of the surface topography of the measured object. The amplitude and phase difference Δθ of the conductive probe are changed due to the long-range electrostatic force.

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Abstract

The invention relates to a method for measuring surface potential by using an electrostatic force microscope. The method solves the problem that Kelvin microscope surface potential measurement range is limited. The method includes: adjusting the electrostatic force microscope to enable the electrostatic force microscope to be operated at electrostatic force phase difference imaging state; selecting a position point to be detected, and scanning the position point to be detected; adjusting pinpoint voltage VEFM value of a microscope conducting probe, and enabling the voltage VEFM value to be changed within a range from -12V to +12V; recording the pinpoint voltage VEFM value and phase difference delta theta obtained through measurement; storing all recorded data as measuring data; performing curve fitting according to the measuring data; and building relation between the pinpoint voltage VEFM value of the microscope conducting probe and the phase difference delta theta according to a curve obtained through fitting. The pinpoint voltage VEFM value of the microscope conducting probe serves as the surface potential of the measured position when the phase difference delta theta obtained according to the relation is minimum. The method for measuring the surface potential by using the electrostatic force microscope can be widely applied to micro-nano scale range surface potential measurement.

Description

technical field [0001] The invention relates to a method for measuring surface potential with an electrostatic force microscope Background technique [0002] In the microscopic analysis of materials, it is often necessary to measure the surface potential of the microscopic area of ​​the material. Now the commonly used method for measuring the surface potential of the microscopic area of ​​​​the material is mainly the Kelvin Probe Force Microscopy (KPFM), but the measurement results of the Kelvin force microscope are single, And the range is limited by the instrument itself. The surface potential measurement range of the MultiMode Nanoscope IIIA system used by the Kelvin force microscope is -10V~+10V, which limits its application range to a certain extent. Contents of the invention [0003] In order to solve the problem of limited measurement range of the surface potential of the Kelvin microscope, the invention provides a method for measuring the surface potential with an ...

Claims

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Application Information

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IPC IPC(8): G01Q60/30
Inventor 孙志韩柏宋伟张冬郭翔宇李振凯王暄雷清泉
Owner HARBIN UNIV OF SCI & TECH
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