Resonant nano three-coordinate touch probe based on fiber Bragg grating

Abstract

The invention discloses a resonant nano three-coordinate contact measuring head based on fiber Bragg grating, which is characterized in that the structure of the measuring head is set as follows: an integrated probe with a ball head is fixed on a suspension bracket in a "T" shape The center point of the suspension bracket, the bracket rods in the same plane on the suspension bracket are radially distributed, the flexible cantilever and the center of the suspension bracket are fixed together, and the distal ends of the flexible arms in the same plane on the flexible bracket are fixed on the outer connection On the ring, it constitutes a measuring probe; the lower end of the FBG sensor set in the packaging layer is fixed on the far end of each support rod in the suspension bracket, and the upper end of the FBG sensor is fixed on the edge of the piezoelectric ceramic vibration plate, and the piezoelectric ceramic vibration plate passes through The thread is fixedly connected to the displacement output shaft of the piezoelectric ceramic, and the piezoelectric ceramic is fixedly connected to the bottom surface of the probe base through the thread. The invention has the advantages of high sensitivity, small measurement force, little influence of microscopic surface force, good long-term stability, good repeatability and small anisotropy.

Description

technical field [0001] The invention relates to a nano three-coordinate measuring head, more specifically a measuring head mechanism of a three-coordinate measuring machine used for nanoscale three-dimensional dimension measurement. Background technique [0002] In the past two decades, microelectronics technology has developed rapidly, and various microdevices have emerged, such as micromechanical parts, microelectromechanical systems MEMS, biomedical devices, and optical devices. The three-dimensional measurement of the geometric feature size of these micro-devices relies on the coordinate measuring machine CMM, but the positioning of each axis and the comprehensive accuracy of the traditional commercial three-coordinate measuring machine can only reach the micron level, which cannot meet the accuracy requirements of nanometer measurement; at the same time, the The diameter of the measuring head probe is relatively large, which cannot be used for small-sized three-dimensio...

Images