Automatic setting method and system for focusing currents on workpiece surface of electron beam processing equipment

A technology of electron beam processing and focusing current, which is applied in the direction of electron beam welding equipment, metal processing equipment, welding equipment, etc., and can solve the problem of low precision

Active Publication Date: 2017-01-18
SINOPEC ENG +1
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is the problem of low precision in the existing method of obtaining focusing current thro

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  • Automatic setting method and system for focusing currents on workpiece surface of electron beam processing equipment
  • Automatic setting method and system for focusing currents on workpiece surface of electron beam processing equipment
  • Automatic setting method and system for focusing currents on workpiece surface of electron beam processing equipment

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Embodiment Construction

[0032] An automatic tuning system for focusing current on the workpiece surface of electron beam processing equipment, such as figure 1 As shown, it consists of central control unit 1, electron beam generator power supply 2, focusing power supply 3, bias sweep power supply 4, transmitter 5, electron gun 6, vacuum working chamber 7 and secondary electron collector 8.

[0033] Central control unit 1: undertakes the control and monitoring of the entire equipment, has the function of digital setting and digital sampling for the operating parameters of the electron beam processing equipment, and configures the program to realize the automatic adjustment of the focusing current.

[0034] Electron beam generator power supply 2: including the cathode heating power supply of the electron beam generator 61, the electron beam accelerating high voltage power supply and the electron beam control grid bias power supply. The central control unit 1 is connected to the electron beam generator ...

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Abstract

The invention discloses an automatic setting method and system for focusing currents on a workpiece surface of electron beam processing equipment. Under the circumstances that the acceleration voltage and the electron beam of electron beam processing equipment are stable, a focusing current is adjusted to increase from a minimum value to a maximum value and a focusing current value If0+ corresponding to a maximum secondary electronic signal value during the gradually increasing discrete variation process is recorded; the focusing current is adjusted to decrease from a maximum value to a minimum value gradually and a focusing current value If0- corresponding to a maximum secondary electronic signal value during the gradually decreasing discrete variation process is recorded; and then on the basis of the focusing current value If0+ and the focusing current value If0-, a focusing current value If0 of focusing of an electronic beam on a metal test piece surface is calculated and determined and is set as a focusing current set value, so that the practical focusing working current is stabilized to be at the value. Therefore, a focusing current value can be obtained rapidly and precisely.

Description

technical field [0001] The invention relates to the technical field of electron beam processing equipment, in particular to a method and system for automatically setting the focusing current on the workpiece surface of the electron beam processing equipment. Background technique [0002] In the electron beam processing equipment, the magnetic field of the magnetic lens is used to generate the Lorentz force on the electron beam, so that the electron beam is guided and its shape is adjusted, so as to achieve the purpose of converging the electron beam. At present, the magnetic field of the magnetic lens is generally generated by a magnetic focusing device, and the magnetic focusing system is mainly composed of an excitation winding and a power supply. The direction of the magnetic field generated by the excitation winding in the electron beam channel is parallel to the flying direction of the electron beam, and the excitation winding is connected with the power supply. The po...

Claims

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Application Information

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IPC IPC(8): G21K1/093H01J37/14B23K15/00
CPCB23K15/0013G21K1/093H01J37/1475
Inventor 黄小东韦寿祺费翔陆苇郭华艳唐强
Owner SINOPEC ENG
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