Automatic setting method and system for focusing currents on workpiece surface of electron beam processing equipment
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- SINOPEC ENG
- Publication Date
- 2017-01-18
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Abstract
Description
technical field
[0001] The invention relates to the technical field of electron beam processing equipment, in particular to a method and system for automatically setting the focusing current on the workpiece surface of the electron beam processing equipment. Background technique
[0002] In the electron beam processing equipment, the magnetic field of the magnetic lens is used to generate the Lorentz force on the electron beam, so that the electron beam is guided and its shape is adjusted, so as to achieve the purpose of converging the electron beam. At present, the magnetic field of the magnetic lens is generally generated by a magnetic focusing device, and the magnetic focusing system is mainly composed of an excitation winding and a power supply. The direction of the magnetic field generated by the excitation winding in the electron beam channel is parallel to the flying direction of the electron beam, and the excitation winding is connected with the power supply. The po...