Three-dimensional surface topography instrument based on light-sheet microscope and three-dimensional image mosaic method
A three-dimensional surface and microscope technology, applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problems of high price and complex structure, and achieve the effect of low cost, simple structure and improved measurement speed
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Embodiment 1
[0022] A three-dimensional surface topography instrument based on a light sheet microscope proposed by the present invention includes two main modules: an illumination module and an imaging module.
[0023] The lighting module includes a light source 1 , an optical collimator 2 and a cylindrical lens 3 . After the light beam from the light source is collimated by the optical collimator, it is focused by a cylindrical lens to form a light sheet.
[0024] There are many ways to generate the light sheet, such as expanding the beam of a point light source and then passing it through a cylindrical lens, or generating it by irradiating a line laser generator with a point light source. The effect is to fan out a beam of collimated light in one dimension to produce a light sheet. Here, as an example, in order to reduce the cost and simplify the system structure, the first way is used to generate the line light sheet.
[0025] The beam size of the calibrated light source is limited, ...
Embodiment 2
[0028] Such as figure 1 As shown, the light beam of the light source 1 is collimated by the optical collimator 2 and focused by the cylindrical lens 3 to form a light sheet, which is parallel to the x direction and irradiates the sample 4 to be tested. The microscope objective lens 5 collects the reflected or backscattered light of the sample 4 to be tested to obtain imaging light, which is focused on the camera 7 through the lens tube lens 6 to form an optical image of the light sheet area on the camera chip 7 . The sample 4 is scanned in the y direction by using a motorized platform to obtain a series of optical images of different light sheet regions, and the series of optical images are spliced in order to obtain a complete surface profile of the sample.
[0029] Such as figure 2 As shown, the image Img obtained by the camera has a resolution of M×N, and the vertical axis of the image represents the Z direction (direction perpendicular to the sample surface). The inci...
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