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Laser spot measurement system and method

A laser spot and measurement system technology, applied in the field of laser spot measurement system, can solve the problem that the imaging unit cannot accurately measure the optimal focal plane height

Active Publication Date: 2020-04-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a laser spot measurement system and method to solve the problem that the existing imaging unit cannot accurately measure the specific height value of the best focal plane

Method used

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  • Laser spot measurement system and method
  • Laser spot measurement system and method

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Experimental program
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Effect test

Embodiment 1

[0033] Fig. 2 (a) is a schematic structural diagram of the laser spot measurement system provided by the first embodiment, including a measurement device 20 and a relay device 21, the relay device 21 is arranged on the measurement device 20, and can be used in the measurement The device 20 moves vertically, wherein the relay device 21 includes: a lens 211 for imaging the laser spot; an imaging unit 212 for receiving and outputting the image formed by the lens.

[0034] Continuing to refer to FIG. 2( a), specifically, the imaging unit 212 includes a photosensitive surface. In actual use, the overall vertical movement of the relay device makes the image of the measured laser spot on the photosensitive surface of the imaging unit 212 clear. .

[0035] The present invention also provides a method for laser spot measurement, the schematic flow chart of which is shown in Figure 2 (b), comprising the following steps:

[0036] Step S21, setting the reference height of the relay devic...

Embodiment 2

[0041] image 3 It is a schematic structural diagram of the laser spot measurement system provided in this embodiment. The laser measurement system includes a measurement device 30 and a relay device 31. The relay device 31 includes: a lens 311, and an imaging unit 312. The molding unit 312 includes photosensitive surface.

[0042] The difference between the structure of the laser spot measurement system in the second embodiment and the first embodiment is that, in order to make the imaging of the laser spot on the imaging unit 312 clearer, the relay device 31 also includes a reference plate 313, the reference Plate 313 has fiducial marks 3130, such as image 3 As shown, the reference mark 3130 is located on the lower surface of the reference plate 313, the lower surface is the marking surface of the reference plate 313, and the marking surface is conjugate to the photosensitive surface of the imaging unit 312, namely Under proper lighting conditions, a clear image of the fidu...

Embodiment 3

[0045] The above-mentioned embodiments are suitable for situations where the laser power is low. In the case of high-power lasers, the laser energy is too high and may damage the imaging unit.

[0046] Such as Figure 4 The shown laser measurement system includes a measuring device 40 and a relay device 41, the relay device 41 includes: a lens 411, an imaging unit 412 and a reference plate 413, the forming unit 412 includes a photosensitive surface, and the reference plate 413 With fiducial markers.

[0047] The difference between the structure of the laser spot measurement system in the third embodiment and the second embodiment is that in order to be suitable for high-power lasers and avoid damage to the imaging unit 412 due to excessive laser energy, the laser spot measurement system also includes a beam splitter 414, please refer to Figure 4 The beam splitter 414 reflects most of the energy of the laser spot and only transmits a small amount of the beam for imaging, so...

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Abstract

The invention provides a laser spot measurement system and method, and the system comprises a measurement device and a relay device. The relay device is disposed on the measurement device, and can make vertical motion on the measurement device. The relay device comprises a lens and an imaging unit. The known position of the relay device on the measurement device is set as a reference height at first, and then the clear imaging of a laser spot on a light sensing surface is achieved through the overall vertical movement of the relay device. The measurement device measures the movement distance of the relay device relative to the reference height, i.e., the height value of an optimal focal plane of the laser spot.

Description

technical field [0001] The invention relates to the technical field of laser packaging, in particular to a laser spot measurement system and method. Background technique [0002] Organic Light-Emitting Diode (OLED), also known as Organic Light-Emitting Diode (OLED), OLED is a major development direction in the field of flat panel display and lighting. Because of the influence of air, a process is required to encapsulate it in a closed space to isolate the external environment. To improve the lifespan of OLEDs, laser encapsulation is a promising process, and corresponding laser encapsulation equipment is needed to complete the laser encapsulation process. [0003] As for the current laser packaging equipment, as shown in FIG. 1( a ), it mainly includes a lens 10 , an imaging unit 11 , and a test bench 12 . Wherein the imaging unit 11 is arranged on the test platform 12, and the imaging unit 11 includes a photosensitive surface. The laser spot passes through the lens 10 and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02G01B11/24
CPCG01B11/02G01B11/24
Inventor 蓝科王诗华
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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