Device and method for measuring pressure intensity of gas inside microspheres
A technology of internal gas and microspheres, which is used in measuring devices, measuring fluid pressure, instruments, etc. It can solve the problems of being unsuitable for measuring gases with strong adsorption, large volume errors and singleness in closed spaces, and achieving a wide range of applicable gases. , the effect of a large diameter range and a wide range of gases
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[0046] like Figure 1-Figure 3 As shown, the device for measuring the internal gas pressure of microspheres of the present invention includes a vacuum shell 2, a microsphere crushing mechanism 1, a calibration ball crushing mechanism 13, a vacuum pump 5, a vacuum valve 4, a vacuum gauge 12 and an adsorption gas removal device; The vacuum shell 2 is embedded with an adsorption gas removal device, the adsorption gas removal device includes a heating assembly and a cooling pipeline 6, the heating assembly heats the vacuum shell 2, and the cooling pipeline 6 cools the vacuum shell 2; the vacuum pump 5 is a molecular pump; the vacuum gauge 12 It is composed of 2 film capacitance gauges with different ranges, the ranges are 10 -4 Pa~1Pa and 1~10 4 Pa; the material of the vacuum shell 2 is 304 stainless steel.
[0047] The microsphere crushing mechanism 1 and the calibration ball crushing mechanism 13 have the same structure and are placed side by side. The microsphere crushing me...
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