Large-area dynamic measurement device and large-area dynamic measurement method in preparation process of nano-film

A nano-film, preparation process technology, applied in the field of optical measurement, can solve problems such as the inability to achieve dynamic measurement
CN108036744AActive Publication Date: 2018-05-15HUAZHONG UNIV OF SCI & TECH

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Publication Date
2018-05-15

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Abstract

The invention belongs to the technical field of optical measurement, and discloses a large-area dynamic measurement device and a large-area dynamic measurement method in the preparation process of a nano-film. The device comprises an incident light path unit and a reflection light path unit. The incident light path unit is used for providing parallel light beams. The parallel light beams pass through a beam expanding lens group, a reflector, a 1 / 4 wave plate, a polarization beam splitter and another 1 / 4 wave plate to be irradiated on the surface of the nano-film and then reflected by the surface of the nano-film. The reflected light beams are divided into three light beams through two beam splitters. The first light beam is subjected to the 1 / 4 wave plate and the polarization beam splitterto be split into two light beams. After that, the two light beams are measured by two imaging modules and then two light intensity values are obtained. The second light beam is subjected to a 1 / 2 wave plate and the polarization beam splitter to be split into two light beams. After that, the two light beams are measured by two imaging modules and then two light intensity values are obtained. The third light beam is subjected to a fourth polarization beam splitter to be split into two light beams. After that, the two light beams are measured by two imaging modules and then two light intensity values are obtained. According to the obtained six light intensity values, a stokes vector is calculated and the least square fitting is performed to extract a to-be-measured parameter. Therefore, thedynamic observation of the preparation process of the nano-film is realized. The device is convenient and reliable in measurement and strong in applicability.
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Description

technical field

[0001] The invention belongs to the technical field of optical measurement, and more specifically relates to a large-area dynamic measurement device and method in the preparation process of a nanometer thin film. Background technique

[0002] The holographic polymer film prepared by photopolymerization in the nano film not only has the advantages of high photosensitive sensitivity and easy processing, but also has excellent data repeatable recording characteristics and information storage stability, so it is widely used in the preparation of holographic data storage media . The preparation mechanism of this kind of holographic polymer film is mainly: taking "organic-inorganic" nanocomposite photopolymerization film as an example, the spatially non-uniform illumination light generates free radicals through the separation of initiators; Molecules react in the bright area and cause chain polymerization of monomer molecules; this polymerization reaction will red...

Claims

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