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Mask plate, display base plate and manufacturing methods of mask plate and display base plate as well as display device

A manufacturing method and mask technology, which are applied in the directions of ion implantation plating, coating, electrical components, etc., can solve the problem of not being able to manufacture high-resolution OLED display substrates, improve the manufacturing fineness, reduce the Shadow effect, and reduce the impact of uniform force effect

Active Publication Date: 2018-08-14
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since FMM is made of metal, it needs to be produced by etching process, and the precision of metal etching process limits the precision of FMM, making it impossible to produce OLED display substrates with high resolution (greater than 300PPI) by using FMM

Method used

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  • Mask plate, display base plate and manufacturing methods of mask plate and display base plate as well as display device
  • Mask plate, display base plate and manufacturing methods of mask plate and display base plate as well as display device
  • Mask plate, display base plate and manufacturing methods of mask plate and display base plate as well as display device

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Embodiment Construction

[0040] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0041] Embodiments of the present invention aim at the problem that FMM cannot produce high-resolution OLED display substrates in the prior art, and provide a mask plate, a display substrate and a manufacturing method thereof, and a display device, capable of producing high-resolution OLED display substrates.

[0042] An embodiment of the present invention provides a mask, including:

[0043] A mask body made of semiconductor material, the mask body includes a plurality of first openings;

[0044] The magnetic semiconductor material layer on the mask body, the magnetic semiconductor material layer includes a plurality of second openings, and the orthographic projection of the second openings on the mask body coincides with the first op...

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Abstract

The invention provides a mask plate, a display base plate and manufacturing methods of the mask plate and the display base plate as well as a display device, and belongs to the technical field of display. The mask plate comprises a mask plate body made of a semiconductor material and a magnetic semiconductor material layer, wherein the mask plate body comprises a plurality of first openings, the magnetic semiconductor material layer is located on the mask plate body, the magnetic semiconductor material layer comprises a plurality of second openings, and orthographic projections of the second openings on the mask plate body coincide with the first openings. According to the technical scheme, the OLED display base plate with the high resolution can be manufactured.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a mask plate, a display substrate, a manufacturing method thereof, and a display device. Background technique [0002] In the prior art, when making the organic light-emitting layer of the OLED display substrate, FMM (Fine Metal Mask, fine metal mask) is generally attached to the substrate to be evaporated, and the organic light-emitting layer of different colors is produced by evaporation. At the corresponding position, full-color display of the entire OLED display substrate is realized. Since the FMM is made of metal, an etching process is required to produce the FMM, and the precision of the metal etching process limits the precision of the FMM, making it impossible to produce a high-resolution (greater than 300PPI) OLED display substrate using the FMM. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04H01L27/32H01L27/15
CPCH01L27/15C23C14/04H10K59/00
Inventor 岳晗王灿张粲杨明玄明花陈小川丛宁
Owner BOE TECH GRP CO LTD
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