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Symmetric mems directional microwave power coupler with online self-testing function

A technology of directional coupler and microwave power, which is applied in the direction of measuring electric power, coupling of optical waveguide, microstructure device composed of deformable elements, etc., can solve the problem that online detection of microwave power at coupling end cannot be realized, and directional microwave power coupler Can not be realized and other problems, to achieve the effect of low microwave loss, high sensitivity, zero DC power consumption

Active Publication Date: 2022-02-15
SOUTHEAST UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the traditional directional microwave power coupler cannot detect the microwave power at the coupling end on-line and cannot realize the dual-port coupling output microwave power because there is only one coupling end output, and provides a symmetrical coupler with an online self-detection function. Type MEMS Directional Microwave Power Coupler

Method used

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  • Symmetric mems directional microwave power coupler with online self-testing function
  • Symmetric mems directional microwave power coupler with online self-testing function
  • Symmetric mems directional microwave power coupler with online self-testing function

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Embodiment Construction

[0030] The specific embodiment of the symmetric MEMS directional microwave power coupler with online self-detection function of the present invention is as follows:

[0031] A CPW transmission line 1 , an ACPS transmission line 2 , a symmetrical directional coupler 3 and four identical capacitive MEMS microwave power sensors 4 are arranged on a GaAs substrate 20 .

[0032] The CPW transmission line is placed horizontally on the GaAs substrate 20 as the input and output ports of the MEMS directional microwave power coupler; the CPW transmission line 1 at the coupling port and the isolation port is used to realize the transmission of microwave signals on the secondary transmission line. The input port on the left is port one 21, the output port on the right is port two 22, the coupling port on the upper left is port three 23, the isolation port on the upper right is port four 24, and the coupling port on the lower left is Port five is 25, and the isolated port on the lower right...

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Abstract

The symmetrical MEMS directional microwave power coupler with online self-detection function of the present invention distributes the signal lines of two sections of ACPS transmission lines symmetrically on the upper and lower sides of the main transmission line, and the length of each section of ACPS transmission line is a quarter wavelength. Constitute a symmetrical directional coupler, use the symmetrical directional coupler to couple the incident microwave power to the coupling port three and five, so that it has the output microwave power of the two coupling ports, thus realizing the dual-port coupling output; in the symmetrical directional A capacitive MEMS microwave power sensor is placed at each of the four connection nodes of the CPW transmission line of the coupler and the ACPS transmission line, and the microwave power transmitted by each port of the two branches is measured by the capacitive MEMS microwave power sensor, realizing the online self-test function; In addition, its fully passive structure has the characteristics of zero DC power consumption and is compatible with GaAs monolithic microwave integrated circuit technology.

Description

technical field [0001] The invention relates to a symmetrical MEMS directional microwave power coupler with an online self-detection function, in particular to a symmetrical MEMS directional microwave power coupler based on MEMS (Micro-Electro-Mechanical-System, micro-electromechanical system) technology. Background technique [0002] Microwave power couplers are passive devices used for directional distribution or power combining of microwave power. Usually, a directional coupler is used to couple out part of the microwave power transmitted in the microwave system. The directional microwave power coupler is a directional four-port microwave power coupling device, which consists of two parts: the main transmission line (main line) and the secondary transmission line (secondary line). The main and secondary lines pass through coupling mechanisms, such as slots, holes And coupled line segments, etc., to couple part of the power of the main line to the secondary line. At pres...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/08G01R21/00G01R35/00B81B7/02B81B7/00B81B3/00B81C1/00
CPCG01R29/0878G01R21/00G01R35/00B81B7/02B81B7/0009B81B3/0064B81C1/00134B81C1/00642
Inventor 张志强孙国琛韩磊黄晓东
Owner SOUTHEAST UNIV
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