Symmetric MEMS directional microwave power coupler with on-line self-detection function

Abstract

According to a symmetric MEMS directional microwave power coupler with an online self-detection function, the signal lines of the two sections of ACPS transmission lines are symmetrically distributedat the upper side and the lower side of a main transmission line, and the length of each section of ACPS transmission line is a quarter wavelength, so that a symmetrical directional coupler is formed.The incident microwave power is respectively coupled to the third coupling end port and the fifth coupling end port by utilizing the symmetrical directional coupler, so that the symmetric MEMS directional microwave power coupler has the output microwave power of two coupling ends, and the dual-port coupling output is realized. Four connection nodes of a CPW transmission line and an ACPS transmission line of the symmetric directional coupler are respectively provided with four capacitive MEMS microwave power sensors, and the capacitive MEMS microwave power sensors are used for measuring the microwave power transmitted by each port of two branches, thereby achieving an online self-detection function. In addition, by adopting a full-passive structure, the symmetric MEMS directional microwavepower coupler has the characteristics of zero direct-current power consumption, compatibility with a gallium arsenide monolithic microwave integrated circuit process and the like.

Description

technical field [0001] The invention relates to a symmetrical MEMS directional microwave power coupler with an online self-detection function, in particular to a symmetrical MEMS directional microwave power coupler based on MEMS (Micro-Electro-Mechanical-System, micro-electromechanical system) technology. Background technique [0002] Microwave power couplers are passive devices used for directional distribution or power combining of microwave power. Usually, a directional coupler is used to couple out part of the microwave power transmitted in the microwave system. The directional microwave power coupler is a directional four-port microwave power coupling device, which consists of two parts: the main transmission line (main line) and the secondary transmission line (secondary line). The main and secondary lines pass through coupling mechanisms, such as slots, holes And coupled line segments, etc., to couple part of the power of the main line to the secondary line. At pres...

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the traditional directional microwave power coupler cannot detect the microwave power at the coupling end on-line and cannot realize the dual-port coupling output microwave power because there is only one coupling end output, and provides a symmetrical coupler with an online self-detection function. Type MEMS Directional Microwave Power Coupler

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