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Symmetric MEMS directional microwave power coupler with on-line self-detection function

A technology of directional coupler and microwave power, which is applied in the direction of measuring electric power, coupling of optical waveguide, microstructure device composed of deformable elements, etc., can solve the problem that online detection of microwave power at coupling end cannot be realized, and directional microwave power coupler Can not be realized and other problems, to achieve the effect of online self-detection coupling power, high sensitivity, high power

Active Publication Date: 2020-06-12
SOUTHEAST UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the traditional directional microwave power coupler cannot detect the microwave power at the coupling end on-line and cannot realize the dual-port coupling output microwave power because there is only one coupling end output, and provides a symmetrical coupler with an online self-detection function. Type MEMS Directional Microwave Power Coupler

Method used

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  • Symmetric MEMS directional microwave power coupler with on-line self-detection function
  • Symmetric MEMS directional microwave power coupler with on-line self-detection function
  • Symmetric MEMS directional microwave power coupler with on-line self-detection function

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Embodiment Construction

[0030] The specific embodiment of the symmetric MEMS directional microwave power coupler with online self-detection function of the present invention is as follows:

[0031] A CPW transmission line 1 , an ACPS transmission line 2 , a symmetrical directional coupler 3 and four identical capacitive MEMS microwave power sensors 4 are arranged on a GaAs substrate 20 .

[0032] The CPW transmission line is placed horizontally on the GaAs substrate 20 as the input and output ports of the MEMS directional microwave power coupler; the CPW transmission line 1 at the coupling port and the isolation port is used to realize the transmission of microwave signals on the secondary transmission line. The input port on the left is port one 21, the output port on the right is port two 22, the coupling port on the upper left is port three 23, the isolation port on the upper right is port four 24, and the coupling port on the lower left is Port five is 25, and the isolated port on the lower right...

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Abstract

According to a symmetric MEMS directional microwave power coupler with an online self-detection function, the signal lines of the two sections of ACPS transmission lines are symmetrically distributedat the upper side and the lower side of a main transmission line, and the length of each section of ACPS transmission line is a quarter wavelength, so that a symmetrical directional coupler is formed.The incident microwave power is respectively coupled to the third coupling end port and the fifth coupling end port by utilizing the symmetrical directional coupler, so that the symmetric MEMS directional microwave power coupler has the output microwave power of two coupling ends, and the dual-port coupling output is realized. Four connection nodes of a CPW transmission line and an ACPS transmission line of the symmetric directional coupler are respectively provided with four capacitive MEMS microwave power sensors, and the capacitive MEMS microwave power sensors are used for measuring the microwave power transmitted by each port of two branches, thereby achieving an online self-detection function. In addition, by adopting a full-passive structure, the symmetric MEMS directional microwavepower coupler has the characteristics of zero direct-current power consumption, compatibility with a gallium arsenide monolithic microwave integrated circuit process and the like.

Description

technical field [0001] The invention relates to a symmetrical MEMS directional microwave power coupler with an online self-detection function, in particular to a symmetrical MEMS directional microwave power coupler based on MEMS (Micro-Electro-Mechanical-System, micro-electromechanical system) technology. Background technique [0002] Microwave power couplers are passive devices used for directional distribution or power combining of microwave power. Usually, a directional coupler is used to couple out part of the microwave power transmitted in the microwave system. The directional microwave power coupler is a directional four-port microwave power coupling device, which consists of two parts: the main transmission line (main line) and the secondary transmission line (secondary line). The main and secondary lines pass through coupling mechanisms, such as slots, holes And coupled line segments, etc., to couple part of the power of the main line to the secondary line. At pres...

Claims

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Application Information

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IPC IPC(8): G01R29/08G01R21/00G01R35/00B81B7/02B81B7/00B81B3/00B81C1/00
CPCG01R29/0878G01R21/00G01R35/00B81B7/02B81B7/0009B81B3/0064B81C1/00134B81C1/00642
Inventor 张志强孙国琛韩磊黄晓东
Owner SOUTHEAST UNIV
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