The invention discloses a symmetric thermoelectric MEMS
microwave standing wave meter, which is characterized in that
signal lines of ACPS transmission lines at the two ends are symmetrically distributed on the upper side and the lower side of a main
transmission line to form a symmetric directional coupler, and incident
microwave power and reflected
microwave power are extracted to a
coupling endand an isolation end of an upper
branch and a lower
branch respectively; a thermoelectric MEMS
microwave power sensor is connected to the
tail end of each CPW
transmission line of the upper
branch and the
tail end of each CPW
transmission line of the lower branch respectively to measure the
microwave power of each port of the two branches, the average value of the measured output thermal voltageis obtained, more accurate incident
microwave power and reflected microwave power can be obtained, and then the standing-wave ratio is obtained. If one branch circuit stops working, the other branch can still work normally, that is, the MEMS microwave
standing wave meter can still carry out measurement, so that the
failure rate is reduced. According to the symmetric thermoelectric MEMS microwave
standing wave meter, the reliability of the MEMS microwave standing wave meter is improved, and the MEMS microwave standing wave meter has the characteristics of zero direct-current
power consumption and compatibility with a
gallium arsenide monolithic microwave integrated circuit process due to adoption of a fully passive structure.