Silicon cantilever coupled T-junction indirectly-heating type millimeter wave signal detecting device

Abstract

The silicon cantilever coupled T-junction indirectly-heating type millimeter wave signal detecting device comprises a sensor module, an analog-to-digital conversion module and a liquid crystal display module. The sensor module is composed of a cantilever coupled structure, a T-junction indirectly-heated type microwave power sensor and a switch. Substrate materials are high resistivity of silicon and the power are tested by the indirectly-heated type microwave power sensor through the CPW signal wire terminal corresponding to an input port. The frequency detecting are achieved by measuring the synthesis power of the two-branch coupling signal with 90 degrees phase difference in the central frequency using the indirectly-heated type millimeter wave power sensor; Phase detecting are achieved by compositing the reference signal of the equal division each to the two-branch coupling signal with 90 degrees phase difference in the central frequency, likewise, the synthesis power are measured by the indirect heating type microwave power sensor, thereby obtaining the phase to be measured. Analogue-to-digital conversion is achieved by the MCS51 single-chip, and the liquid crystal display is composed of three LCD screens.

Description

technical field [0001] The invention provides an indirect heating millimeter-wave signal detector based on a silicon-based cantilever T-junction, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Millimeter waves belong to microwaves in the higher frequency band, and are of great significance in communication, radar, guidance, remote sensing technology, radio astronomy, clinical medicine and spectroscopy. As the three basic parameters of microwave signals, the detection of power, frequency and phase plays an important role in millimeter wave systems. Based on the continuous development and maturity of MEMS technology, many electronic components and mechanical components have been successfully miniaturized, and their performance is no less than that of traditional components, and microwave signal detectors are no exception. However, currently existing microwave signal detectors, including power detectors, frequency...

AI Technical Summary

Problems solved by technology

However, currently existing microwave signal detectors, including power detectors, frequency detectors and phase detectors, are relatively independent devices, and in microwave systems where power, phase and frequency need to be measured simultaneously, independent devices The size of the circuit is relatively large, and there are electromagnetic compatibility problems at the same time, so the research on the integrated detection system of millimeter wave signals has become the trend of future development.

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