Dual-channel self-detection MEMS microwave power divider and preparation method thereof

Abstract

The invention provides a dual-channel self-detection MEMS microwave power divider and a preparation method thereof. The dual-channel self-detection MEMS microwave power divider comprises a microwave power divider located on a gallium arsenide substrate, a thermoelectric MEMS microwave power sensor and three capacitive MEMS microwave power sensors. The microwave power divider is of a T-shaped symmetrical structure and comprises three ports, and an ACPS signal line is arranged in the middle of the microwave power divider. The thermoelectric MEMS microwave power sensor is located in an annular area formed by the ACPS signal line. Each capacitive MEMS microwave power sensor is connected with one of the ports through a CPW structure. By the capacitive MEMS microwave power sensors and the thermoelectric MEMS microwave power sensor, whether two ports of the MEMS microwave power divider are equally divided into microwave power or not or whether mismatch occurs or not can be detected on line inreal time through the capacitive channel and the thermoelectric channel; and the ratio of the microwave power at the input port to the microwave power at the output port is measured on line, so thatthe real-time on-line power self-detection of the MEMS microwave power divider is realized.

Description

technical field [0001] The invention relates to the technical field of microwave system electronic devices, in particular to a dual-channel self-detecting MEMS microwave power divider. Background technique [0002] A power divider is a device that divides the energy of one input signal into two or more outputs with equal or unequal energy. A device that combines the energy of multiple signals into one output is called a power combiner. With the development of the communication and Internet of Things industries, the demand for microwave / millimeter wave devices is increasing. In particular, microwave power dividers, as a microwave power distribution and synthesis device, are widely used in microwave systems. Moreover, higher requirements are placed on the performance and reliability of microwave power splitters. [0003] Through the investigation of the application of traditional microwave power dividers, it is found that their performance will deteriorate due to assembly an...

AI Technical Summary

Problems solved by technology

[0003] Through the investigation of the application of traditional microwave power dividers, it is found that their performance will deteriorate due to assembly and welding problems in microsystem components, and long-term work under high microwave power will easily lead to aging of isolation resistance and other problems, resulting in poor output. Equal division, or even cause device failure

Images