The invention relates to a micro friction
measurement device, and belongs to the technical field of micro force measurement. By adjusting a
fine tuning knob on a lifting platform, loading
normal load is realized. Resistance strain gages are adhered to front and back surfaces of an elastic element, form a
Wheatstone bridge through leads, so as to indirectly measure the
normal load. Two fixed pole plates and a moving pole plate form a differential capacitive sensor; the two fixed pole plates are fixed on the lifting platform through supporting rods; the moving pole plate is connected with a detachable connecting block through a connecting piece; when a
servo motor is operated to drive a
ball screw, to enable a sample stage to perform
linear motion, the connecting block suffers frictional force, a small displacement in the horizontal direction can occur, and the polar distance between the pole plates can be changed, therefore, the
capacitance of the capacitive sensor is changed, and the friction measurement is realized. The micro friction
measurement device has a simple structure, can realize force loading without a high-precision placement platform, improves the measurement sensitivity, greatly reduces the linear error, and has a good effect on measuring micro force, such as
friction force and the like.