Fixed beam directly heated microwave signal detector
A microwave signal and heating technology, applied to instruments, measuring devices, measuring electrical variables, etc., can solve the problems of large volume and achieve high sensitivity, no DC power consumption, and low power consumption
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[0021] The fixed beam direct heating microwave signal detector of the present invention consists of a six-port fixed beam coupler 1, a channel selection switch 2, a microwave frequency detector 3, a microwave phase detector 4, and a first direct heating microwave power sensor 5-1 Cascade structure; six-port fixed beam coupler 1 is composed of coplanar waveguide 10, dielectric layer 12, air layer 15 and fixed beam 13 across it; coplanar waveguide 10 is made of SiO 2 On the layer 9, the anchor region 11 of the fixed beam 13 is made on the coplanar waveguide 10, and the dielectric layer 12 is deposited under the fixed beam 13, and forms a coupling capacitor structure together with the air layer 15 and the fixed beam 13, two The length of the coplanar waveguide 10 between the fixed support beams 13 is λ / 4; the channel selection switch 2 is composed of the coplanar waveguide 10, the anchor region 11, the dielectric layer 12, the cantilever beam 14, and the pull-down electrode 28; th...
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