The invention discloses a semiconductor device and a manufacturing method thereof. The semiconductor device comprises a substrate, a semiconductor layer located on the substrate, a source and a drain located on the semiconductor layer, a gate located between the source and the drain, a source field plate located on the semiconductor layer and connected with the source, wherein the source field plate passes across the gate, the gate/source region and part of the gate/drain region, and air isolation is carried out; one end of the source field plate is connected with the source; two or more than two metal field plates are connected in parallel to form connection between the source field plate and the source; and the other end of the source field plate is located on the semiconductor layer, close to the gate, between the gate and the drain. A role of electric field modulation of the source field plate can be fully played, parasitic gate/source capacitance and parasitic conduction resistance can be fully reduced, and reliability of the device is improved.