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State-controllable symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof

A symmetrical and thermoelectric technology, which is applied in electric power measurement by thermal method, piezoelectric effect/electrostrictive or magnetostrictive motor, TV, etc., can solve the problem of large volume, single operating frequency, and inability to realize state transition And other issues

Active Publication Date: 2020-04-21
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these standing wave meters exhibit large size, active detection, single operating frequency and inability to realize state transition function

Method used

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  • State-controllable symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof
  • State-controllable symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof
  • State-controllable symmetric thermoelectric MEMS microwave standing wave meter and preparation method thereof

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Experimental program
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Effect test

Embodiment Construction

[0040] A specific embodiment of a state-controllable symmetrical thermoelectric MEMS microwave standing wave meter of the present invention is as follows:

[0041] A CPW transmission line 1, an ACPS transmission line 2, a symmetrical directional coupler 3, four identical MEMS microwave switches 8, an air bridge 18, a connection line 20 and four identical thermoelectric MEMS microwave power sensors are arranged on a GaAs substrate 21 4, and a MEMS substrate film structure 22 is designed near the substrate of the load resistor 15 .

[0042]The CPW transmission line 1 is placed horizontally on the GaAs substrate 21 as the input and output of the MEMS microwave standing wave meter; the CPW transmission line 1 at the coupling port and the isolation port is used to realize the transmission of the coupled microwave signal. The input port on the left is port one 31, the output port on the right is port two 32, the coupling port on the upper left is port three 33, the isolation port on...

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Abstract

The invention discloses a state-controllable symmetric thermoelectric MEMS microwave standing wave meter, which is characterized in that a symmetric directional coupler is adopted to extract incidentmicrowave power and reflected microwave power to a coupling end and an isolation end of an upper branch and a lower branch respectively; a thermoelectric MEMS microwave power sensor is adopted to measure the power of each port of the two branches, more accurate incident microwave power and reflected microwave power can be obtained by averaging, and then the standing-wave ratio can be obtained. Thedesigned two branches can work independently to realize a measurement function, so that the failure rate is reduced; in order to realize a state switching function of the MEMS microwave standing wavemeter, an MEMS microwave switch is additionally arranged on an extraction branch of the MEMS microwave standing wave meter; and when the MEMS microwave switch is in an off state, the incident microwave power is not extracted any more and is directly transmitted to an output port, so that the loss of the microwave power when detection is not needed is reduced. The state-controllable symmetric thermoelectric MEMS microwave standing wave meter improves the reliability of the MEMS microwave standing wave meter, and has the characteristics of low loss, small chip area and compatibility with a gallium arsenide monolithic microwave integrated circuit process.

Description

technical field [0001] The invention relates to a microwave standing wave meter for online detection of standing wave ratio and a preparation method thereof, in particular to a state-controllable symmetrical thermoelectric MEMS based on MEMS (Micro-Electro-Mechanical-System) technology Microwave standing wave meter and preparation method. Background technique [0002] In modern microwave high-density integrated microsystems, a microwave standing wave meter is a key component in the self-testing application of microwave system modules, and is used to characterize the standing wave ratio in microwave systems. Microwave high-density integrated microsystems require modules such as antennas and TR components to be highly integrated for micro-reconnaissance, interference, and frequency detection. As the size of the microwave system becomes smaller and the degree of integration is higher and higher, the performance of highly integrated microsystems varies greatly, it is difficult ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/08G01R21/02B81B7/02B81C1/00
CPCG01R29/0878G01R21/02B81B7/02B81C1/00539
Inventor 张志强孙国琛韩磊黄晓东
Owner SOUTHEAST UNIV
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