Silicon-based cantilever beam-based T-junction direct heating millimeter wave signal detection instrument

Abstract

The invention relates to a silicon-based cantilever beam coupling-based T-junction direct heating millimeter wave signal detection instrument, which comprises a sensor module, an analog-to-digital converter module and a liquid crystal display module, wherein the sensor module consists of a cantilever beam coupling structure, a T-junction direct heating microwave power sensor and a switch, and a substrate material is high-resistance Si; the power is detected by the direct heating microwave power sensor at a CPW (Coplanar waveguide) signal line terminal corresponding to an input port, and the frequency detection is realized by using the direct heating microwave power sensor to measure the synthesis power of two paths of coupling signals with a phase difference of 90 degrees at the center frequency; and the phase detection is realized by respectively synthesizing the two paths of coupling signals with a phase difference of 90 degrees at the center frequency and two paths of halved reference signal, and the synthesis power is detected by the direct heating microwave power sensor to obtain the phase of the signal to be measured. The analog-to-digital converter is realized by a single-chip microcomputer MCS51, and the liquid crystal display part consists of three liquid crystal display screens.

Description

technical field [0001] The invention provides a direct heating millimeter-wave signal detection instrument based on a silicon-based cantilever beam T-junction, which belongs to the technical field of micro-electromechanical systems (MEMS). Background technique [0002] Electromagnetic waves with a length of 1 to 10 millimeters are called millimeter waves, which are in the higher microwave frequency band and have important research value in communication, radar, guidance, remote sensing technology, radio astronomy, clinical medicine and spectroscopy. Power, frequency and phase are the three major parameters of microwave signals, and their detection is an important part of electromagnetic measurement, which plays a key role in the application of microwave technology. Based on the continuous development and maturity of MEMS technology, many electronic components and mechanical components have been successfully miniaturized, and their performance is no less than that of traditio...

AI Technical Summary

Problems solved by technology

However, currently existing microwave signal detectors, including power detectors, frequency detectors and phase detectors, are relatively independent devices, and in microwave systems where power, phase and frequency need to be measured simultaneously, independent devices The size of the circuit is relatively large, and there are electromagnetic compatibility problems at the same time, so the research on the integrated detection system of millimeter wave signals has become the trend of future development.

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