Clamped beam T-shaped junction direct heating on-line known frequency microwave phase detector

Abstract

The invention provides a clamped beam T-shaped junction direct heating on-line known frequency microwave phase detector. The clamped beam T-shaped junction direct heating on-line known frequency microwave phase detector is composed of a six-interface clamped beam coupler, a microwave phase detector and a direct heating type microwave power sensor; the six-interface clamped beam coupler is composed of a coplanar waveguide, a medium layer, an air layer and clamped beams; the coplanar waveguide is on a SiO2 layer, the medium layer is deposited below the clamped beam, the medium layer and the air layer constitute a coupling capacitance structure, and the coplanar waveguide length between the two clamped beams is lambda / 4; the power coupling from a first interface to a third interface and to a fourth interface and from the first interface to a fifth interface and to a sixth interface of the six-interface clamped beam coupler is the same, and a signal to be detected is input through the first interface of the six-interface clamped beam coupler, is output to the direct heating type microwave sensor through the third interface and the fifth interface, and is output to the microwave phase detector through the fourth interface and the sixth interface, and is output to an inferior processing circuit through a second interface; finally on-line phase detection from 0-360 degrees of a known frequency signal is achieved.

Description

technical field [0001] The invention provides a solid-supported beam T-junction direct heating on-line known-frequency microwave phase detector, which belongs to the technical field of micro-electromechanical systems. Background technique [0002] The phase detection of microwave signals is widely used in phase modulators, phase shift keying (PSK), phase-locked loops (PLL), antenna phase pattern testing, and phase characteristics measurement of various microwave devices. Therefore, it is necessary to grasp and control the phase of the signal in the microwave frequency band, and the phase of the microwave signal has become an important measurement parameter. The present invention designs an on-line microwave phase detector with a fixed beam T-junction directly heating the on-line known frequency microwave phase detector based on the Si process to realize on-line phase detection. Contents of the invention [0003] Technical problem: The phase detector in the traditional mic...

AI Technical Summary

Problems solved by technology

[0003] Technical problem: The phase detector in the traditional microwave circuit not only has DC power consumption, but also completely consumes the input detection signal; a six-port fixed beam coupler is used to couple a small part of the signal for phase detection, and most of the detection signal can be input In the next-level processing circuit, realize the 0-360° phase online detection of the known frequency signal, and have the benefit of low power consumption

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