Cantilever beam gas sensor with multiple detection electrodes

Abstract

The invention discloses a cantilever beam gas sensor with multiple detection electrodes, which comprises a cantilever beam, wherein multiple detection electrodes are integrated on the cantilever beam,the multiple detection electrodes are distributed at different positions of the cantilever beam, and the temperatures of the different positions of the cantilever beam are different. According to thegas sensor with the multiple detection electrodes, multiple pairs of detection electrodes are respectively distributed at different positions of the cantilever beam, and the temperature distributionof the cantilever beam changes in a gradient manner, so that the temperature of the area where each pair of detection electrodes is located is different, and even if the same gas sensitive material isused, when gas comes, gas responses obtained on each pair of detection electrodes are different, and the cantilever beam gas sensor can be used for gas identification to a certain extent.

Description

technical field [0001] The invention relates to the technical field of MEMS (micro-electromechanical systems) gas sensors, in particular to a cantilever beam gas sensor with multiple detection electrodes. Background technique [0002] MEMS gas sensors based on metal oxide semiconductor (MOS) materials have the advantages of low power consumption, fast response, small size, low cost, easy combination with CMOS circuits, and wide detection range. Broad prospects. [0003] Traditional MOS MEMS gas sensors are mainly based on closed membrane and suspended membrane research, the former has higher mechanical strength, such as the MEMS gas sensor and its manufacturing method provided by the publication number CN 105987935 A, this closed membrane The typical gas sensor usually consumes 50-100 milliwatts. The latter has lower power consumption and faster thermal response speed. The DC power consumption can be as low as 20 milliwatts, and the thermal response speed can reach tens of ...

AI Technical Summary

Problems solved by technology

[0006] Although the gas sensor with a single cantilever beam has reduced power consumption to a very low level, its core area is at the top of the cantilever beam, using the highest temperature area at the top of the cantilever beam, and most gas-sensitive materials are actually at a certain temperature. There is a response across the range, so it is inevitable that a large amount of heat is distributed throughout the cantilever beam and is wasted

[0007] For gas recognition, a variety of different gas sensors are usually required, and the existing technology usually uses discrete devices to add different gas-sensitive materials to the same MEMS micro heater, which will greatly increase the manufacturing capacity of the sensor. The complexity of the program reduces the unity of the process

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