Off-line trimming device and trimming method for polishing disc

Abstract

The invention provides an off-line trimming device and a trimming method for a large-size polishing disc. The off-line trimming device of the polishing disc, the guide rail frame is installed on the support, the screw and the guide rail are arranged parallel to each other on the guide rail frame, the dressing shaft box is set on the mounting plate, the mounting plate is set on the lead screw, and the translation motor drives the screw to rotate Thus, the mounting plate and the trimming shaft box are driven to move horizontally along the guide rail, and the diamond dressing disc is installed at the lower end of the trimming shaft box. A rotating motor is installed inside the trimming shaft box to control the rotation of the diamond dressing disc and to control the diamond dressing disc to move up and down in the vertical direction. A linear motor, a plurality of the adjustment pads are arranged on the upper surface of the turntable, a rotating handle is arranged on the adjustment pads, a plurality of the support plates are fixed on the turntable, and locked by the locking screws arranged on the support plates tight. The invention can realize fast and precise trimming of polishing disks of different specifications and sizes, has simple trimming operation and good stability, and one trimmer can meet the trimming requirements of multiple processing equipments.

Description

technical field [0001] The invention relates to an off-line trimming device and a trimming method of a polishing disc during the polishing process of a large-diameter optical element, in particular to a trimming device and a trimming method of a double-sided polishing machine or a single-axis machine polishing disc. Background technique [0002] At present, chemical mechanical polishing technology has been widely used to meet the requirements of nano-scale ultra-smooth surface of optical components. Material removal of components and a globally ultra-smooth, damage-free planarized surface. As an important part of the chemical mechanical polishing system, the polishing disc (pad) plays a very important role in the polishing process. As the carrier of abrasives and components, on the one hand, the mechanical properties of the polishing disc, such as elastic modulus, hardness, etc., have an important impact on the deformation and polishing pressure of the polishing disc, and t...

AI Technical Summary

Problems solved by technology

For double-sided polishing machines with different sizes of upper and lower discs, the upper polishing disc generally adopts a free-hinged clamping method, which is convenient for loading and unloading, but the shape trimming is difficult, and the in-situ shape control cannot be realized by the movement of the equipment itself. Off-line trimming must be used.

However, the precision of the single-axis machine is insufficient, and the trimming precision is difficult to meet the consistency requirements

Therefore, the shape of the polishing disc of a single-axis machine and the upper polishing disc of a double-sided polishing machine mainly depends on the shape of the substrate. After the substrate is pasted with a polishing pad, it is not trimmed or a small amount of uniform trimming is performed. The control of the trimming process is poor, and the trimming accuracy is relatively low. Low

Images