Off-line finishing device and finishing method for polishing discs

Abstract

The invention provides an off-line finishing device and finishing method for large-size polishing discs. According to the off-line finishing device for the polishing discs, a guide rail frame is installed on a support, a lead screw and guide rails are arranged on the guide rail frame in parallel, a finishing shaft box is arranged on an installation plate, the installation plate is arranged on thelead screw, and a horizontal movement motor drives the lead screw to rotate so as to drive the installation plate and the finishing shaft box to horizontally move along the guide rails. A diamond finishing disc is installed at the lower end of the finishing shaft box, a rotating motor for controlling the diamond finishing disc to rotate and a linear motor for controlling the diamond finishing discto move up and down in the vertical direction are arranged in the finishing shaft box, multiple adjusting cushion blocks are arranged on the upper surface of a rotary table, and a rotating handle isarranged on each adjusting cushion block. Multiple supporting plates are fixed to the rotary table and locked through locking screws arranged on the supporting plates. Rapid and precise finishing of the polishing discs of different specifications and sizes can be achieved, the finishing operation is easy, the stability is good, and one finishing machine can meet the finishing requirements of multiple machining devices.

Description

technical field

[0001] The invention relates to an off-line trimming device and a trimming method of a polishing disc during the polishing process of a large-diameter optical element, in particular to a trimming device and a trimming method of a double-sided polishing machine or a single-axis machine polishing disc. Background technique

[0002] At present, chemical mechanical polishing technology has been widely used to meet the requirements of nano-scale ultra-smooth surface of optical components. Material removal of components and a globally ultra-smooth, damage-free planarized surface. As an important part of the chemical mechanical polishing system, the polishing disc (pad) plays a very important role in the polishing process. As the carrier of abrasives and components, on the one hand, the mechanical properties of the polishing disc, such as elastic modulus, hardness, etc., have an important impact on the deformation and polishing pressure of the polishing disc, and t...

Examples

Embodiment

[0043] Embodiment: size is Φ520mm * 50mm plane polishing disk is trimmed, and the finishing process of polishing disk is as follows:

[0044] 1) Place the flat polishing disc 13 on the adjustment block 6;

[0045] 2) Adjust the height of the three adjustment pads 6 by rotating the handle 14, so that the rotating surface of the polishing disc 13 is parallel to the rotating surface of the turntable 7, and the parallelism is better than 2 μm;

[0046] 3) Adjust the adjustment screw 12 to adjust the space inclination of the guide rail frame 10, so that the rotary surface of the polishing disc 13 is parallel to the guide rail 11, and the parallelism is better than 2 μm;

[0047] 4) Adjust the locking screw 4 and tighten the polishing disc 13;

[0048] 5) Start the linear motor arranged inside the dressing shaft box 1, adjust the height of the diamond dressing disc 3, make the diamond dressing disc 3 fit the polishing disc 13, and then press down 0.05mm;

[0049] 6) Start the turn...

technical field

[0001] The invention relates to an off-line trimming device and a trimming method of a polishing disc during the polishing process of a large-diameter optical element, in particular to a trimming device and a trimming method of a double-sided polishing machine or a single-axis machine polishing disc. Background technique

[0002] At present, chemical mechanical polishing technology has been widely used to meet the requirements of nano-scale ultra-smooth surface of optical components. Material removal of components and a globally ultra-smooth, damage-free planarized surface. As an important part of the chemical mechanical polishing system, the polishing disc (pad) plays a very important role in the polishing process. As the carrier of abrasives and components, on the one hand, the mechanical properties of the polishing disc, such as elastic modulus, hardness, etc., have an important impact on the deformation and polishing pressure of the polishing disc, and t...

Examples

Embodiment

[0043] Embodiment: size is Φ520mm * 50mm plane polishing disk is trimmed, and the finishing process of polishing disk is as follows:

[0044] 1) Place the flat polishing disc 13 on the adjustment block 6;

[0045] 2) Adjust the height of the three adjustment pads 6 by rotating the handle 14, so that the rotating surface of the polishing disc 13 is parallel to the rotating surface of the turntable 7, and the parallelism is better than 2 μm;

[0046] 3) Adjust the adjustment screw 12 to adjust the space inclination of the guide rail frame 10, so that the rotary surface of the polishing disc 13 is parallel to the guide rail 11, and the parallelism is better than 2 μm;

[0047] 4) Adjust the locking screw 4 and tighten the polishing disc 13;

[0048] 5) Start the linear motor arranged inside the dressing shaft box 1, adjust the height of the diamond dressing disc 3, make the diamond dressing disc 3 fit the polishing disc 13, and then press down 0.05mm;

[0049] 6) Start the turn...

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