Off-line finishing device and finishing method for polishing discs

Abstract

The invention provides an off-line finishing device and finishing method for large-size polishing discs. According to the off-line finishing device for the polishing discs, a guide rail frame is installed on a support, a lead screw and guide rails are arranged on the guide rail frame in parallel, a finishing shaft box is arranged on an installation plate, the installation plate is arranged on thelead screw, and a horizontal movement motor drives the lead screw to rotate so as to drive the installation plate and the finishing shaft box to horizontally move along the guide rails. A diamond finishing disc is installed at the lower end of the finishing shaft box, a rotating motor for controlling the diamond finishing disc to rotate and a linear motor for controlling the diamond finishing discto move up and down in the vertical direction are arranged in the finishing shaft box, multiple adjusting cushion blocks are arranged on the upper surface of a rotary table, and a rotating handle isarranged on each adjusting cushion block. Multiple supporting plates are fixed to the rotary table and locked through locking screws arranged on the supporting plates. Rapid and precise finishing of the polishing discs of different specifications and sizes can be achieved, the finishing operation is easy, the stability is good, and one finishing machine can meet the finishing requirements of multiple machining devices.

Description

technical field [0001] The invention relates to an off-line trimming device and a trimming method of a polishing disc during the polishing process of a large-diameter optical element, in particular to a trimming device and a trimming method of a double-sided polishing machine or a single-axis machine polishing disc. Background technique [0002] At present, chemical mechanical polishing technology has been widely used to meet the requirements of nano-scale ultra-smooth surface of optical components. Material removal of components and a globally ultra-smooth, damage-free planarized surface. As an important part of the chemical mechanical polishing system, the polishing disc (pad) plays a very important role in the polishing process. As the carrier of abrasives and components, on the one hand, the mechanical properties of the polishing disc, such as elastic modulus, hardness, etc., have an important impact on the deformation and polishing pressure of the polishing disc, and t...

AI Technical Summary

Problems solved by technology

For double-sided polishing machines with different sizes of upper and lower discs, the upper polishing disc generally adopts a free-hinged clamping method, which is convenient for loading and unloading, but the shape trimming is difficult, and the in-situ shape control cannot be realized by the movement of the equipment itself. Off-line trimming must be used.

However, the precision of the single-axis machine is insufficient, and the trimming precision is difficult to meet the consistency requirements

Therefore, the shape of the polishing disc of a single-axis machine and the upper polishing disc of a double-sided polishing machine mainly depends on the shape of the substrate. After the substrate is pasted with a polishing pad, it is not trimmed or a small amount of uniform trimming is performed. The control of the trimming process is poor, and the trimming accuracy is relatively low. Low

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