The utility model relates to the technical field of
semiconductor cleaning equipment, in particular to a supporting structure for cleaning a
quartz boat. The utility model provides a supporting structure for cleaning a
quartz boat, which can enable the limiting
assembly to selectively lock the rotation angle of the supporting
assembly by arranging the mounting plate
assembly, the lifting rod, the rectangular frame, the supporting assembly, the limiting assembly and the driving assembly, so as to switch the bucket-shaped state or the arch-shaped state of the supporting assembly. The supporting assembly can meet the supporting requirements of the two different types of
quartz workpieces including the circular tube quartz workpiece and the semicircular tube quartz workpiece, the horizontal cleaning
advantage of the circular tube quartz workpiece is reserved, meanwhile, the horizontal cleaning requirement of the semicircular tube quartz workpiece is met by switching the arch state of the supporting assembly, and the cleaning efficiency of the circular tube quartz workpiece is improved. And the semicircular tube quartz workpiece is soaked and cleaned in an inverted buckling mode, the draining difficulty of the semicircular tube quartz workpiece is low, the possibility of cleaning dead corners and
dirt accumulation is reduced, automatic operation is facilitated, and efficiency is improved.