An Abrasive Jet Adaptive Dressing Method for Consolidated Abrasive Polishing Pads
A technology of abrasive jet and fixed abrasive, which is applied in grinding/polishing equipment, parts of grinding machine tools, abrasive surface adjustment devices, etc., can solve the problems of poor technical stability and low efficiency, achieve good dressing effect and improve dressing effective, efficient
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[0027] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0028] Such as Figure 1-3 shown.
[0029] A method for adaptive dressing of abrasive jets for fixed abrasive polishing pads, the process of which is as follows image 3 As shown, the specific steps are as follows:
[0030] First of all, abrasive jet technology and adaptive parameter setting technology are used as polishing pad dressing methods, such as figure 1 shown;
[0031] Secondly, the characteristics of the surface state of the polishing pad at different stages (including the initial stage, the middle stage, and the end stage) are obtained through image feature recognition; image features include color features, image texture features, shape features, and feature point sizes, etc. The characteristics of the surface state of the throwing pad at different processing stages, such as sharp state, passivation state, etc.;
[0032] Third, obtain t...
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