An optical detection device and detection equipment using the same
A technology of optical detection and optical components, which is applied in the direction of optical devices, measuring devices, and optical testing for flaws/defects, etc. It can solve the problems of unsatisfied high-precision detection requirements, high reciprocating motion speed requirements, and increased costs, etc., to achieve The effect of improving functional integration and detection efficiency, improving detection accuracy and detection efficiency, and reducing overall machine cost and failure rate
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Embodiment 1
[0043]An optical detection device, see Figure 1-Figure 7 , the optical inspection device 4000 includes a main inspection camera assembly 4100 , a re-inspection camera assembly 4200 , a positioning camera assembly 4300 , a line scanning drive assembly 4400 , a drag chain assembly 4500 and a double-cavity box frame 4600 .
[0044] Connection relationship: the line scanning drive assembly 4400 is set in the lower cavity of the double-chamber box frame 4600, the drag chain assembly 4500 is set in the upper cavity of the double-chamber box frame 4600, the main inspection camera assembly 4100, re-inspection camera assembly The camera assembly 4200 and the positioning camera assembly 4300 move laterally under the drive of the line scan drive assembly 4400 .
[0045] Wherein, the positioning camera assembly 4300 performs optical positioning of the object to be tested, the main inspection camera assembly 4100 conducts a line scan preliminary detection of the positioned object to be te...
Embodiment 2
[0071] A detection device, see Figure 8 , the testing equipment includes a vibration-absorbing stand 2000 , a platform module 3000 , and an optical detection device 4000 , wherein the platform module 3000 and the optical detection device 4000 are arranged on the shock-absorbing stand 2000 .
[0072] Further, the platform module 3000 includes a transfer device 3100 and an air flotation platform 3200. The external manipulator transfers the substrate to be tested to the air flotation platform 3200 of the platform module 3000, and transfers the substrate to be tested along the feeding direction through the transfer device 3100. The test piece substrate is transported to the detection station below the optical detection device 4000 .
[0073] Detection principle:
[0074] First, the substrate to be tested is moved along the feeding direction by the transfer device 3100 (see Figure 9a , there are unmarked DUTs on the substrate, and the sizes of the DUTs are the same, or they may...
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