Ultraviolet ray cleaning device and cleaning method

A technology of washing device and washing method, which is applied in the direction of cleaning methods and utensils, chemical instruments and methods, and cleaning methods using gas flow, etc., which can solve the problems of high price and complicated devices, and achieve the effect of reducing the quantity and realizing the washing speed

Active Publication Date: 2006-06-14
GS YUASA INT LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, according to the method described in this document, the window material 1 must have heating means, so that the device has a new problem: the device becomes complicated and expensive.

Method used

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  • Ultraviolet ray cleaning device and cleaning method
  • Ultraviolet ray cleaning device and cleaning method
  • Ultraviolet ray cleaning device and cleaning method

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Embodiment Construction

[0033] The ultraviolet cleaning device of the present invention is a part of the substrate cleaning device 10 for cleaning the glass substrate of the liquid crystal display (ie, the object to be processed in the present invention). As shown in Figure 1, the substrate cleaning device is respectively provided with a conveying unit 11, an ultraviolet cleaning device 20 related to the present invention, a conveying unit 12 and a wet cleaning device 13 from left to right in a front view. The ultraviolet cleaning device 20 and the wet cleaning device 13 have the same conveying device 14 as the conveying unit 11 inside (see FIG. 2 ). In the substrate cleaning apparatus 10 in FIG. 1 , the working surface W (glass substrate) is sequentially transported from left to right in the direction of the arrow shown in FIG. 1 . That is, the substrate cleaning device 10 forms an integral continuous cleaning operation line.

[0034] As shown in FIG. 2, the ultraviolet ray cleaning device 20 is pr...

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PUM

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Abstract

This is an ultraviolet cleaning device, which is characterized in that it irradiates ultraviolet rays from an ultraviolet lamp on the conveyed object to be processed, and is equipped with a gas supply channel, so that the gas passes through a gas diffusion plate and is sprayed onto the ultraviolet irradiated surface of the object to be processed. superior.

Description

technical field [0001] The present invention relates to an ultraviolet cleaning device for cleaning the surface of an object to be treated by ultraviolet rays and a cleaning method using the ultraviolet cleaning device. Background technique [0002] For example, in the manufacturing process of liquid crystal display panels and semiconductor devices, an ultraviolet cleaning device is used to clean the surface of the substrate, that is, the organic matter on the surface is oxidized and decomposed by the irradiation of ultraviolet rays on the substrate. [0003] It is generally believed that the substrate (object to be processed) is irradiated with ultraviolet rays by such an ultraviolet cleaning device, and oxygen molecules in the air around the substrate are first absorbed by ultraviolet rays to generate ozone. Ozone is further irradiated with ultraviolet rays to form active radicals that are photodecomposed to generate active oxygen and the like. Then use this active group ...

Claims

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Application Information

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IPC IPC(8): H01L21/304B08B5/02B08B7/00C03C23/00
CPCB08B5/023B08B7/0057C03C23/002B08B11/04H01L21/304
Inventor细谷浩二坂元弘实
OwnerGS YUASA INT LTD