Method of displaying measurement result in inspection process and system thereof, and computer program

Abstract

A method of displaying a measurement result in an inspection process using network, the method includes a first step that a host, which intensively controls and manages a device for inspecting a lot to be processed in one or a plurality of steps, transmits to the device a condition of measuring a lot determined to be put in, a second step that the device measures the lot based on the measurement condition received via the network and then obtains measured data, a third step that the host determines whether the measured data received via the network is abnormal or normal based on a predetermined assessment standard and then produces a result of assessing a measured value so as to transmit the result to the device and a fourth step that the device provides a display corresponding to the result of assessing the measured value in accordance with the received result of assessing the measured value as well as a previously registered display standard.

Description

[0001]Notice: More than one reissue application has been filed for the reissue of U.S. Pat. No. 6,990,421. The reissue applications are this application (U.S. application Ser. No. 12 / 018,757), filed on Jan. 23, 2008, which is a reissue of U.S. Pat. No. 6,990,421, and U.S. application Ser. No. 12 / 959,289, filed on Dec. 2, 2010, which is a divisional reissue of U.S. Pat. No. 6,990,421.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to a method of checking a result of a measurement and more particularly to a method of displaying a measurement result in an inspection process using a network and a system thereof and further to a computer program.[0004]2. Description of Related Art[0005]Conventionally, one host terminal is installed for one measuring device in an operational environment in an inspection process in a factory for manufacturing things such as semiconductors. Also, regarding the measuring device, there are measuring devices equipp...

AI Technical Summary

Benefits of technology

The present invention provides a method for displaying a measurement result in an inspection process using a network. The method includes steps of transmitting a condition for measuring a lot, measuring the lot, and assessing the measured data. The assessment is done based on a predetermined standard. The method also includes steps of displaying the result of the assessment on a device monitor connected to the host. The display can show the operating condition of the device and the result of the measurement. The invention also includes a computer program and a system for displaying the measurement result in the inspection process. The technical effects of the invention include improved efficiency and accuracy in inspecting lots, as well as improved communication between the host and the device.

Problems solved by technology

However, technologies of the prior art have the following problems.

However, it is not possible to instantly perform validation of the measured result by referring to the appearance.

Also, when an inspector of an inspection process is in charge of a plurality of devices and gets stuck with a device that takes a few minutes to measure one lot, the inspector may be away from other measuring devices.

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