79results about How to "Reduce spot size" patented technology

The present invention relates to the apparatus, system and method for dicing of semiconductor wafers using an ultrafast laser pulse of femtosecond and picosecond pulse widths directly from the ultrafast laser oscillator without an amplifier. Thin and ultrathin simiconductor wafers below 250 micrometer thickness, are diced using diode pumped, solid state mode locked ultrafast laser pulses from oscillator without amplification. The invention disclosed has means to avoid / reduce the cumulative heating effect and to avoid machine quality degrading in multi shot ablation. Also the disclosed invention provides means to change the polarization state of the laser beam to reduce the focused spot size, and improve the machining efficiency and quality. The disclosed invention provides a cost effective and stable system for high volume manufacturing applications. An ultrafast laser oscillator can be a called as femtosecond laser oscillator or a picosecond laser oscillator depending on the pulse width of the laser beam generated.

The invention relates to a charged particle multi-beamlet system for exposing a target using a plurality of beamlets. The system has a charged particle source, an aperture array, a beamlet manipulator, a beamlet blanker, and an array of projection lens systems. The charged particle source is configured to generate a charged particle beam. The aperture array is configured to define separate beamlets from the generated beam. The beamlet manipulator is configured to converge groups of the beamlets towards a common point of convergence for each group. The beamlet blanker is configured to controllably blank beamlets in the groups of beamlets. Finally, the array of projection lens systems is configured to project unblanked beamlets of the groups of beamlets on to the surface of the target. The beamlet manipulator is further adapted to converge each of the groups of beamlets towards a point corresponding to one of the projection lens systems.

The present invention provides a hard coat agent composition that is useful for forming a hard coat layer with excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance, on the surfaces of various articles. The present invention also provides an optical information medium using the above hard coat agent composition. A hard coat agent composition comprising a fluorine-containing block copolymer (A1), a fluorine-containing polyether compound (A2) comprising an active energy ray-reactive group, and an active energy ray-curable compound (B). An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition.

Methods and systems for small angle CD metrology with a small spot size are introduced to increase measurement sensitivity while maintaining adequate throughput necessary for modern semiconductor manufacture. A small angle CD metrology system includes a small angle spectroscopic ellipsometry (SE) subsystem combined with a small angle spectroscopic reflectometry system, both operated at small angles of incidence. The small angle SE subsystem is configured to operate in a complete Mueller Matrix mode to further improve measurement sensitivity. The small angle CD metrology system includes an objective having all reflective surfaces in the light path. In some embodiments, the all-reflective objective is a Schwartzschild objective having an axicon mirror element to further reduce measurement spot size. In some embodiments, the small angle CD metrology system includes a dynamic aperture subsystem to isolate specific ranges of angles of incidence and azimuth for improved measurement sensitivity.

The present invention provides a hard coat agent composition that is useful for forming a hard coat layer with excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance, on the surfaces of various articles. The present invention also provides an optical information medium using the above hard coat agent composition. A hard coat agent composition comprising a fluorine-containing polyether compound (A) comprising an active energy ray-reactive group, and a curable compound (B) comprising two, or three or more active energy ray-polymerizable groups within each molecule. An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition.

A superlens for controlling the size and the phase of an electromagnetic beam that passes through it, and a method for independently controlling the horizontal and vertical focusing of the electromagnetic beam using the superlens is provided. The superlens comprises a vertically GRIN multi-layer structure with one or more horizontally curved sidewalls. The vertical focusing is controlled by varying the longitudinal thickness of the multi-layer structure. The horizontal focusing is controlled by varying the profile and the radius of curvature of the horizontally curved sidewalls. Varying the thickness and radius of curvature is done by etching. Also provided is a method for making the superlens.

Decrease in optical near-field intensity is prevented when an light propagating medium made of a high refractive index material, such as a waveguide or a lens, is combined with a scatterer for producing optical near-field. Near the optical near-field generating element, a second light propagating medium is disposed in contact with a first light propagating medium of a high refractive index material, such as a waveguide or a lens. The refractive index of the second light propagating medium is made smaller than the refractive index of the first light propagating medium.

A TAMR (Thermal Assisted Magnetic Recording) write head uses the energy of optical-laser excited surface plasmons in a scalable planar plasmon generator to locally heat a magnetic recording medium and reduce its coercivity and magnetic anisotropy. The planar plasmon generator is formed as a multi-layered structure in which one planar layer supports a propagating surface plasmon mode that is excited by evanescent coupling to an optical mode in an adjacent waveguide. A peg, which can be a free-standing element or an integral projection from one of the layers, is positioned between the ABS end of the generator and the surface of the recording medium, confines and concentrates the near field of the plasmon mode immediately around and beneath it.

It is described an emitter (26, 40) for X-ray tubes comprising: a flat foil with an emitting section (30, 46); and at least two electrically conductive fixing sections (31-34; 41-44); wherein the emitting section (30, 46) is unstructured.

The present invention provides an optical information medium in which the recording and / or reproducing beam incident side surface displays excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance. An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition comprising a fluorine-containing block copolymer (A) and an active energy ray-curable compound (B).

A charged particle multi-beamlet system for exposing a target (11) using a plurality of beamlets. The system comprises a charged particle source (1) for generating a charged particle beam (20), a beamlet aperture array (4D) for defining groups of beamlets (23) from the generated beam, a beamlet blanker array (6) comprising an array of blankers for controllably blanking the beamlets (23), a beam stop array (8) for blanking beamlets (23) deflected by the blankers, the beam stop array (8) comprising an array of apertures, each beam stop aperture corresponding to one or more of the blankers, and an array of projection lens systems (10) for projecting beamlets on to the surface of the target. The system images the source (1) onto a plane at the beam stop array (8), at the effective lens plane of the projection lens systems (10), or between the beam stop array (8) and the effective lens plane of the projection lens systems (10), and the system images the beamlet aperture array (4D) onto the target (11).

The invention relates to a heliostat system with the function of sun pursuing, which comprises a heliostat, a mirror holder of the heliostat, a bracket of the heliostat, a driving device for sub mirrors of the heliostat and a driving device for the mirror holder of the heliostat, wherein the mirror holder of the heliostat is rotatablely installed on the bracket of the heliostat, the driving device for the mirror holder of the heliostat is respectively connected with the mirror holder of the heliostat and the bracket of the heliostat and is used for driving the mirror holder of the heliostat to rotate around a horizontal rolling shaft, the heliostat comprises at least two sub mirrors of the heliostat, the sub mirrors of the heliostat are rotatablely installed on the mirror holder of the heliostat, the driving device for the sub mirrors of the heliostat is respectively connected with the mirror holder of the heliostat and the sub mirrors of the heliostat and is used for driving the sub mirrors of the heliostat to link around respective horizontal pitching shafts, and the horizontal pitching shafts are arranged in parallel and are also arranged with the horizontal rolling shaft vertically. The heliostat system with the function of sun pursuing, which is disclosed by the invention, has a skillful design, a simple structure and higher reliability, has the function of sun pursuing, can be used for effectively improving the problem of wind resistance, is simpler to maintain and rectify and is suitable for large-scale popularization and application.

It is described an emitter (26, 40) for X-ray tubes comprising: a flat foil with an emitting section (30, 46); and at least two electrically conductive fixing sections (31-34; 41-44); wherein the emitting section (30, 46) is unstructured.

Decrease in optical near-field intensity is prevented when an light propagating medium made of a high refractive index material, such as a waveguide or a lens, is combined with a scatterer for producing optical near-field. Near the optical near-field generating element, a second light propagating medium is disposed in contact with a first light propagating medium of a high refractive index material, such as a waveguide or a lens. The refractive index of the second light propagating medium is made smaller than the refractive index of the first light propagating medium.

A metal layer having an aperture for delivering light, a method of forming the same, a light delivery module including the metal layer having the aperture, and a heat assisted magnetic recording head including the same are provided. The aperture of the metal layer has an inlet and an outlet of different sizes, and also has curved side surfaces. Also, the light delivery module includes the metal layer at an output end thereof, and the heat assisted magnetic recording head includes the light delivery module as an optical heating unit.

A thermally assisted recording magnetic head is provided in which a magnetic recording medium can be irradiated with light having a spot size reduced in the submicron order with high total optical propagation efficiency. In a magnetic head, a spot size converter that propagates the light from an optical source in the magnetic head is provided adjacent to a main pole. The spot size converter includes a cover layer having a refractive index lower than that of a clad material and formed in contact with the optical waveguide core, and is formed in a shape composed of a substantially rectangular shape in a light traveling direction and a tapered shape where the width is increased toward the bottom surface of the magnetic head. The optical waveguide core having the cover layer formed is vertically interposed between multi-mode-thin-film-like cores that can excite a first or higher-order optical waveguide mode.

A projection lens arrangement for a charged particle multi-beamlet system, the projection lens arrangement including one or more plates and one or more arrays of projection lenses. Each plate has an array of apertures formed in it, with projection lenses formed at the locations of the apertures. The arrays of projection lenses form an array of projection lens systems, each projection lens system comprising one or more of the projection lenses formed at corresponding points of the one or more arrays of projection lenses.

The present invention provides an optical information medium in which the recording and / or reproducing beam incident side surface displays excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance. An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition comprising a fluorine-containing block copolymer (A) and an active energy ray-curable compound (B).

An optical coupling device has an optical wave-guide varied in difference in specific refractive index between a clad layer and a core layer, and the optical wave-guide serves as a convergent / divergent spot size converter; since reduction in cross section of the core layer is not required for the convergent / divergent spot size converter so that the optical coupling device is produced at a high production yield.

Provided is an optically addressable spatial light modulator (OASLM)-based holographic display and a method of operating the same. The display includes an addressing unit including a light source unit emitting a plurality of recording beams, a driving mirror array including driving mirrors that each reflect a recording beam incident thereon, and a mirror member array including mirror members that each obliquely reflect a recording beam incident thereon, in which each of the driving mirrors corresponds to one of the mirror members. The recording beams, which are transmitted by the addressing unit, are focused onto the OASLM by micro lenses of a lenslet array. The OASLM is optically addressed by the recording beams focused by the micro lenses of the lenslet array and thus modulates and diffracts a reproduction beam, incident thereon from a reproduction beam providing unit, and thus a holographic image is reproduced.

A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.

Provided is a thermally-assisted magnetic recording head with improved light density of near-field light (NF-light) with which a medium is irradiated. The head comprises: a magnetic pole; a waveguide for propagating light for exciting surface plasmon; a surface plasmon generator provided between the magnetic pole and the waveguide, coupled with the light in a surface plasmon mode, and emitting NF-light; and a clad portion provided at least between the waveguide and the surface plasmon generator and comprising a transition region in which a refractive index decreases along a direction from the waveguide toward the magnetic pole. The provision of the clad portion including the transition region enables improvement of the light density of NF-light due to the convergence of surface plasmon excited in the surface plasmon generator to predetermined locations, while avoiding the problem of temperature rise due to reduction of the volume of surface plasmon generator.

The invention provides an ink jet device for producing a biological assay substrate. The device releases a plurality of substances onto the substrate from print heads, provided with the substances. The device further comprises means to subject the printed substrates to an accelerated motion. The accelerated motion which acts about perpendicular to the surface of the substrates acts to control penetration of the substances into the substrate. The invention also relates to a method for producing a biological assay substrate, and to a biological assay substrate obtainable by such method.

A projection device comprising, a red light source, a green light source, and a blue light source which can emit red, green and blue light respectively, a beam combiner which is configured such that it can combine light beams; a means for collimating the light emitted from the red, green and blue light sources to provide red, green and blue collimated light beams, an optical modifier means, which is arranged such that the optical modifier means can receive the red, green and blue collimated light beams, and wherein the optical modifier means is configured to modify cross sectional dimensions of the red, green and blue collimated light beams to provide red, green and blue projection beams each of which has a circular cross section, and wherein the optical modifier means is configured, and the distances between the light sources and means for collimating are set, such that the dimensions of the circular cross sections of the red, green and blue projection beams are equal at a predetermined distance from the projection device such that the spot sizes of each of the red, green and blue projection beams are equal or have predefined sport sizes at the predetermined distance from the projection device; MEMS mirror which is configured such that it can oscillate about at least one oscillation axis to scan the red, green and blue projection beams across a projection screen which is positioned at the predetermined distance from the projection device.

The invention provides an all-fiber STED super-resolution microscopic illumination device. The device mainly consists of a laser 1, a delay unit 2 and a beam generator 3, wherein the beam generator 3mainly consists of a double-clad fiber 4 and a polarization controller 5; the beam generator 3 can convert short-wave laser light 6 and long-wave laser light 7 emitted by the laser 1 into Gauss-shapedexcitation light 8 and hollow annular loss light 9, respectively; and since the light spot centers of the generated light are completely coincided and the light is irradiated on a fluorescent sample10 in sequence after the delay of the delay unit 2, stimulated emission depletion (STED) is generated, fluorescent light 11 with extremely small light spot is stimulated, and the final resolution is not limited by the diffraction of light, thereby breaking the diffraction limit and realizing all-fiber STED super-resolution microscopic illumination. The device has the advantages of highly integrating light beam generators and enabling equipment to be more flexible and stable.

A method and system for optical measurement via a resonator having a non-uniform phase profile provides a mechanism for measuring and / or detecting sub-micron surface features with increased resolution. A second surface forming part of a resonator is illuminated through a first partially reflective surface that has a non-uniform phase profile that transitions from negative to positive phase with respect to a resonance phase value of the resonator. As a result, a reduced spot size is produced at the second surface, which enhances the resolution of a measurement and / or detection of surface features on the second surface. Additionally, if a discontinuity is provided in the non-uniform phase profile, interaction of the discontinuity with surface features of the second surface will provide enhanced resolution of the surface features. The resolution of the system is improved over the resolution that can be attained using a Fabry-Perot resonator.