Method for manufacturing dual-layer quartz cylinder

A production method and technology of quartz tubes, applied in the direction of manufacturing tools, glass molding, glass manufacturing equipment, etc., can solve the problems of adverse interference in the growth process, etc., to ensure the efficiency and uniformity of film growth, high processing accuracy, and simple operation Effect

Inactive Publication Date: 2012-07-25
SUZHOU KC QUARTZ ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These reactors generally work well at low pressures and relatively low temperatures, but when used at high pressures and temperatures, substantial heat convection occurs naturally, adversely interfering with the growth process

Method used

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  • Method for manufacturing dual-layer quartz cylinder
  • Method for manufacturing dual-layer quartz cylinder
  • Method for manufacturing dual-layer quartz cylinder

Examples

Experimental program
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Effect test

Embodiment 1

[0019] Such as figure 1 and 2 As shown, the double-layer quartz cylinder according to this embodiment includes an outer cylinder body 1 constituting the shape of the quartz cylinder, an inner cylinder body 2 arranged in the outer cylinder body 1 and lower in height than the outer cylinder body 1, and an inner cylinder body 2 arranged horizontally Wafer carrier 3 on top. The inner cylinder body 2 and the outer cylinder body 1 have the same bottom surface, and the axes of the two coincide. Ventilation holes 10 are evenly distributed in the circumferential direction, and a gas passage 8 communicating with the ventilation holes 10 is formed between the inner surface of the outer cylinder body 1 and the outer surface of the inner cylinder body 2 .

[0020] Such as image 3 As shown, the chemical gas required for chemical deposition is evenly introduced into the cylinder through the vent hole 10 on the outer cylinder body 1. After the chemical gas passes through the gas cha...

Embodiment 2

[0022] This embodiment provides a method for manufacturing the double-layer quartz cylinder described in the embodiment, which includes the following steps:

[0023] (1) Making the outer cylinder: take a fused quartz tube, and use a hydrogen-oxygen flame to heat the lower port of the fused quartz tube to make it in a molten state, see Figure 4 and Figure 5 The lower end of the fused quartz tube is turned inside out to form an arc-shaped connection section 7 by using a secondary molding lathe and an arc-shaped graphite mold 6, which is annealed by electric heating, and drilled in a numerically controlled machining center after cutting to form the Air vent 10, and the upper port milling taper surface of the fused quartz tube, and then the inner end of the arc connecting section 7 is chamfered;

[0024] (2) To make double-layer quartz tube: Take another fused quartz tube, cut it with a scribe line, grind both ends to the precision, use hydrofluoric acid to remove metal ...

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Abstract

The invention relates to a method for manufacturing a dual-layer quartz cylinder. The dual-layer quartz cylinder comprises an outer cylinder which is used for forming the appearance of the quartz cylinder, an inner cylinder which is arranged in the outer cylinder and is lower than the outer cylinder and a wafer bearing platform which is arranged at the top end of the inner cylinder horizontally, wherein the inner cylinder and the outer cylinder are arranged on the same bottom surface, and axial leads of the inner cylinder and the outer cylinder are coincided with each other; the outer cylinder is provided with a plurality of vent holes which are distributed along the circumferential direction of the outer cylinder uniformly on the side wall, which is lower than the wafer bearing platform,of the outer cylinder; and an air channel communicated with the vent holes is formed between the inner side surface of the outer cylinder and the outer side surface of the inner cylinder. In a manufacturing method, the appearance of the dual-layer quartz cylinder is ensured by a two-step sintering process on the premise of ensuring precision; the manufactured dual-layer quartz cylinder has a simple structure and a skillful design; and even if a reactor with the structure is used at a high temperature under high pressure, a membrane still grows under the airflow of laminar flow all the time soas to ensure the growth efficiency and the uniformity of the membrane.

Description

technical field [0001] The invention relates to a manufacturing method of a double-layer quartz cylinder, which is suitable for manufacturing semiconductor devices such as wafers of light-emitting diodes. Background technique [0002] Wafers of semiconductor devices such as light emitting diodes are generally manufactured using chemical vapor deposition processes. The process is usually carried out in a chemical vapor deposition reactor. Chemical vapor deposition reactor design is a key factor in obtaining the high-quality films required for semiconductor manufacturing. Gas flow dynamics for high-quality film deposition are preferably laminar for high growth efficiency and uniformity. Current chemical vapor deposition reactor designs include rotating disk reactors, planetary rotary reactors, and close-coupled nozzles. These reactors generally work well at low pressures and relatively low temperatures, but when used at high pressures and temperatures, substantial heat conv...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): H01L21/00H01L21/673H01L33/00C03B23/207
Inventor沈法松
OwnerSUZHOU KC QUARTZ ELECTRONICS