High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge

Abstract

The invention discloses a high-frequency response two-dimensional micro angular deflection control reflector based on a double-shaft flexible hinge, and belongs to a light beam control device. The high-frequency response two-dimensional micro angular deflection control reflector based on the double-shaft flexible hinge comprises a reflector, a two-dimensional deflection mechanism based on the double-shaft flexible hinge, a drive mechanism and a control system, wherein the reflector is fixedly assembled on a rigid platform of the two-dimensional deflection mechanism based on the double-shaft flexible hinge; an incident light beam is emitted after being reflected by the reflector; and the control system controls a positive micro drive mechanism and a negative micro drive mechanism to push the rigid platform at a high speed along a negative position and a positive position respectively at symmetric positions, so that the reflector on the rigid platform deflects at a micro angle to realize the direction control of the emitted light beam; and a displacement sensor of the control system feeds the rotation angle information of the reflector back to a computer system to adjust the micro deflection angle of the reflector in real time. The high-frequency response two-dimensional micro angular deflection control reflector based on the double-shaft flexible hinge has the characteristics of no-coupling and no-axial translation in a two-dimensional deflecting direction, and high response speed.

Description

technical field [0001] The invention belongs to the technical field of beam control, and mainly relates to a high-response two-dimensional micro-angle pendulum control reflector based on a biaxial flexible hinge. Background technique [0002] Micro pendulum control mirrors are often used in optical systems to control the rapid angular deflection of light beams and realize the direction correction and stabilization of light beams. For example, in the adaptive optics system, it is used to correct the overall tilt of the beam front; in the field of wireless optical communication technology, it is used to achieve the alignment and stability of the beam; Tracking; used in the field of high-energy lasers and precision collimation to stabilize the beam direction. In the application of these optical systems, in order to improve the beam control accuracy and obtain good compensation, tracking and control effects, it is required that the beam fast deflection control device must have ...

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Problems solved by technology

In this method, the maximum deflection angle of the beam is related to the refractive index of the liquid material used. The realized beam deflection range can reach 30°, and the response speed is on the order of milliseconds. loss, the voltage between the electrode plates on both sides of the cavity wall needs to reach tens of volts, and in order to increase the beam deflection angle, it is necessary to increase the voltage difference between the electrode plates to increase the wedge angle of the liquid micro-wedge prism, while The distance between the electrode plates is on the order of microns to millimeters, so a very strong electric field is formed in the cavity, which is easy to cause breakdown, and the manufacturing process of the device is relatively complicated

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