High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge
A technology of flexible hinges and mirrors, applied in installation, optics, instruments, etc., can solve the problems of complex device manufacturing process, increase the voltage difference of electrode plates, increase the liquid micro-wedge prism, etc., and achieve completely consistent response characteristics and optimized width and the effect of thickness
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[0026] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0027]A high-response two-dimensional micro-angle pendulum control mirror based on a biaxial flexible hinge, a biaxial flexible hinge 5 is fixed on the upper surface of the base 4, and a rigid platform 2 is vertically placed on the output end of the biaxial flexible hinge 5. And a two-dimensional micro-angle deflection occurs around the biaxial flexible hinge 5, and the two-dimensional deflection mechanism is composed of the base 4, the biaxial flexible hinge 5 and the rigid platform 2; the reflector 1 is fixed on the upper end surface of the rigid platform 2, and the reflector 1, The rigid platform 2, the biaxial flexible hinge 5 and the center of the base 4 are coaxial; the driving mechanism is composed of four piezoelectric ceramic drivers 3, corresponding piezoelectric ceramic driving power sources 8 and fasteners 7, of which the four piezo...
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