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Differential-capacitive length sensor

A technology of length sensor and differential capacitance, which is applied to instruments, electrical devices, electromagnetic means, etc., can solve the problems of high production cost, complex circuit, harsh production environment, etc. Detecting the effects of puzzles

Inactive Publication Date: 2012-02-22
张华建
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0006] It can be seen that the main disadvantages of the current technology are: high production cost, harsh production environment, complex circuit

Method used

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Embodiment Construction

[0019] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific illustrations.

[0020] Such as figure 1 As shown, the differential capacitive length sensor of the present invention includes a fixed capacitive plate 1 , a capacitive dynamic plate 2 , a capacitive plate seat 3 , a measuring rod 4 , and a spring device 5 .

[0021] Among them, the capacitor fixed plate 1 is two cylinders separated by rubber rings 6 with a thickness of 0.5 mm to 2.0 mm, and the two ends of the capacitor fixed plate 1 are respectively connected to a capacitor plate seat 3 through rubber rings 7; A capacitive dynamic plate 2 is arranged in the cylinder of the fixed pole plate 1. The capacitive dynamic pole plate 2 has an outer radius slightly smaller than the inner radius of the capacitor fixed pole plate and can move horizontally in the cylindri...

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Abstract

The invention discloses a differential-capacitive length sensor which adopts a differential-capacitive technology and has the accuracy of higher than 0.1mum. The device comprises a capacitor fixing polar plate, a capacitor movable polar plate, a capacitor polar plate seat, a measuring rod and a spring device. The capacitor fixing polar plate is a cylinder which is separated by two rubber bands; two ends of the capacitor fixing polar plate are respectively connected with a capacitor polar plate seat by the rubber bands; the capacitor movable polar plate is arranged in the cylinder of the capacitor fixing polar plate; the capacitor movable polar plate is a cylinder, the outer radius of which is slightly less than the inner radius of the capacitor fixing polar plate and which can move horizontally in the cylinder of the capacitor fixing polar plate; the capacitor movable polar plate is connected with the measuring rod; and the spring device which is used for controlling the measuring rod to horizontally move is arranged outside the capacitor polar plate seat. As the traditional grating moire fringe technology is not used in the invention, the laser reticle and the processing reforming of moire fringes are not needed, the production and manufacturing cost is greatly reduced, and a backend processing circuit is relatively simple.

Description

Technical field: [0001] The invention relates to the field of length sensors used for measuring displacement, depth, etc., in particular to a length sensor using differential capacitance technology with an accuracy higher than 0.1 μm. Background technique: [0002] At present, the length sensor with an accuracy higher than 0.1 μm is mainly realized by grating moiré fringe technology. Its implementation method is mainly divided into the following three steps: [0003] The first step: Scribe a piece of glass with equal pitch to make a fixed grating, which is the core component of the sensor. The smaller the grating pitch, the higher the accuracy. The pitch accuracy is closely related to the accuracy of the sensor. In order to ensure the accuracy, the current grating marking is mainly done by laser marking, and it is completed in a dust-free and vibration-free environment. Foreign grating length sensors with an accuracy higher than 0.1 μm are all laser scribed for the fixed ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02
Inventor 张华建
Owner 张华建
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