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Two-dimensional parallel micromotion platform driven by piezoceramic

A piezoelectric ceramic drive, micro-movement platform technology, applied in the parts, instruments and other directions of the instrument, can solve the problems of reducing the accuracy and natural frequency of the movement, limiting the installation of the displacement sensor, and the structure is not compact enough to achieve compact structure and rigidity. High, simple structure

Inactive Publication Date: 2014-12-24
SHANDONG UNIV
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Problems solved by technology

However, the platform adopts a straight hinge, although it is easy to process and increase the working stroke, but the accuracy and natural frequency of the movement are reduced, and the overall size of the platform is large, and the structure is not compact enough, which limits the installation of displacement sensors

Method used

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  • Two-dimensional parallel micromotion platform driven by piezoceramic
  • Two-dimensional parallel micromotion platform driven by piezoceramic
  • Two-dimensional parallel micromotion platform driven by piezoceramic

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Embodiment Construction

[0034] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0035] figure 1 Schematic diagram of the internal structure of the two-dimensional parallel micro-motion platform driven by piezoelectric ceramics. The present invention adopts a parallel structure and consists of a base 1, a motion platform 2, a first piezoelectric ceramic driver 7, a second piezoelectric ceramic driver 20, a displacement amplification mechanism, a guiding mechanism and a displacement sensor. The first piezoceramic driver 7 and the second piezoceramic driver 20 are vertically placed in respective cylindrical grooves on the base, and the two ends of the first piezoceramic driver 7 and the second piezoceramic driver 20 respectively pass through The hemispherical first thrust hemisphere 8 and the second thrust hemisphere 21 are connected with other components, and one end of the first piezoelectric ceramic driver 7 and the second piezoel...

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Abstract

The invention discloses a two-dimensional parallel micromotion platform driven by piezoceramic, which comprises a base, a motion platform, piezoceramic drivers, a displacement magnifying mechanism, a guiding mechanism and the like, wherein a first piezoceramic driver and a second piezoceramic driver are arranged in cylindrical grooves in the base respectively in a mutual perpendicular manner; and the output ends of the drivers closely lean against an input hinge of the displacement magnifying mechanism to transmitting movement to the motion platform through the displacement magnifying mechanism and the guiding mechanism. Through the adoption of the secondary magnifying mechanism and the compound parallel four-pole guiding mechanism, the two-dimensional parrel micromotion platform has the advantages that the structure of the micromotion platform is compact; high natural frequency is ensured when the large stroke movement is realized; the X-axis direction and the Y-axis direction can be effectively decoupled; zero friction, zero clearance, high-precision, high stability, quick respond of the movement transmission are ensured by the combination of the piezoceramic drivers and the flexure hinge platform; displacement sensors are arranged in the X-axis direction and the Y-axis direction respectively by the motion platform; and the full-closed loop control of the micromotion platform is convenient to realize.

Description

technical field [0001] The invention relates to a two-dimensional parallel micro-motion platform, in particular to a two-dimensional parallel micro-motion platform driven by piezoelectric ceramics. Background technique [0002] In recent years, with the continuous advancement of science and technology and industrial technology, the fields of microelectronics manufacturing, ultra-precision machinery manufacturing, micro-robot operation, precision measuring optical instruments, and biomedical operations have developed rapidly, and there is an urgent need to be able to position with nanometer precision and operating systems and equipment. In these fields, the micro-motion platform with nanometer precision is its core component, and its research is favored by scholars at home and abroad. Traditional mechanical structures, such as motors, gears, hinges, etc., cannot achieve nanometer precision due to the influence of assembly and movement gaps, friction, damping and other factor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
Inventor 闫鹏刘鹏博郭雷
Owner SHANDONG UNIV
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