Two-dimensional parallel micromotion platform driven by piezoceramic
A technology of piezoelectric ceramic drive and micro-motion platform, which is applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve the problems of reducing the accuracy and natural frequency of motion, restricting the installation of displacement sensors, and not compact enough structure, etc., to achieve The effect of compact structure, high rigidity and simple structure
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 The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
 figure 1 Schematic diagram of the internal structure of the two-dimensional parallel micro-motion platform driven by piezoelectric ceramics. The present invention adopts a parallel structure and consists of a base 1, a motion platform 2, a first piezoelectric ceramic driver 7, a second piezoelectric ceramic driver 20, a displacement amplification mechanism, a guiding mechanism and a displacement sensor. The first piezoceramic driver 7 and the second piezoceramic driver 20 are vertically placed in respective cylindrical grooves on the base, and the two ends of the first piezoceramic driver 7 and the second piezoceramic driver 20 respectively pass through The hemispherical first thrust hemisphere 8 and the second thrust hemisphere 21 are connected with other components, and one end of the first piezoelectric ceramic driver 7 and the second piezoel...
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