Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle

A two-dimensional micro-motion and frequency adjustment technology, which is applied to large fixed members, machine tool parts, feeding devices, etc., can solve problems such as complex motion control, inconsistent displacement amplification factors of the motion platform, and difficulty in meeting the needs of high-speed and precise motion. The effect of simple control, reduced motion inertia, and improved performance

Active Publication Date: 2014-08-20
FOSHAN HUADAO SUPER PRECISION TECH CO LTD
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  • Claims
  • Application Information

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Problems solved by technology

The traditional two-dimensional micro-feeding device usually adopts a fixed frequency design, which puts forward extremely high requirements on material characteristics and manufacturing errors. Especially when processing different products, its driving frequency usually changes, so that the displacement amplifica

Method used

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  • Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle
  • Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle
  • Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle

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Example Embodiment

[0031] The technical solutions of the present invention are further described below with reference to the accompanying drawings and through specific embodiments.

[0032] like Figure 1 to Figure 3 The shown two-dimensional micro-movement platform with adjustable stiffness and frequency based on the principle of stress stiffening includes an X-direction film group 201, a Y-direction film group 202, an X-direction motion sub-platform 203, a Y-direction motion sub-platform 204, and an outer frame 205. , X-direction drive, Y-direction drive, X-direction displacement sensor 8, Y-direction displacement sensor 10, frame 1 and working platform 5;

[0033] The outer frame 205 is fixed to the frame 1; the elastic X-direction film group 201 is arranged on both sides of the X-direction motion sub-platform 203, one end of which is connected to the inner side wall of the outer frame 205, and the other end is connected to the inner side wall of the outer frame 205. One end is connected to ...

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Abstract

The invention relates to a precise two-dimensional motion occasion, can be used for precise displacement compensation of a general X-Y motion platform and particularly relates to a stiffness frequency adjustable two-dimensional micro-motion platform based on a stress stiffening principle. The stiffness frequency adjustable two-dimensional micro-motion platform based on the stress stiffening principle comprises X-direction and Y-direction motion sub-platforms, corresponding drivers and a micro-motion working platform, utilizes a film group for adjusting tensile force through screws as a flexible chain and achieves independent adjustment of vibrating frequency. By adopting the structure, the stiffness frequency adjustable two-dimensional micro-motion platform is based on prestress films, is adjustable in frequency and can adjust the inherent frequency of the micro-motion platform according to different working conditions and driving frequencies before working or in the working process, two feeding motion directions are orthogonal, and coupling of the micro-motion working table during two-dimensional motion is avoided.

Description

technical field [0001] The invention relates to a precision motion platform, which can be used for precise operation and macro-micro compound high-speed precision compensation. The invention specifically relates to a two-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening. Background technique [0002] In order to realize two-dimensional precision motion, an accurate and stable feed mechanism is particularly important, because it is closely related to the quality of the product. In addition, due to the small size and high precision of the complex optical free-form surface, strict requirements are placed on the micro-feed mechanism. The micro-feed system is the basis for processing such products, and it is widely used in fast-tool servo feed systems, micro-motion worktables, and macro-micro composite platforms. The traditional two-dimensional micro-feeding device usually adopts a fixed frequency design, which ...

Claims

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Application Information

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IPC IPC(8): B23Q5/34
CPCB23Q1/34B23Q1/62B23Q5/28B23Q2210/002B23Q2230/004B23Q5/34
Inventor 杨志军白有盾陈新高健杨海东王梦汤晖
Owner FOSHAN HUADAO SUPER PRECISION TECH CO LTD
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