Design of reflective wave strip sheet with single-stage diffraction characteristic and manufacturing method thereof

A single-stage diffraction and zone plate technology, applied in diffraction gratings and other directions, can solve the problems of restricting the confidence level and precision of spectral analysis technology data, improve monochromatic performance, suppress high-order harmonics, and efficiently filter out Effect

Inactive Publication Date: 2014-10-22
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Application Information

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Problems solved by technology

The presence of high-order harmonic components severely restricts the data confidence level and precision of spectral analysis techniques

Method used

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  • Design of reflective wave strip sheet with single-stage diffraction characteristic and manufacturing method thereof
  • Design of reflective wave strip sheet with single-stage diffraction characteristic and manufacturing method thereof
  • Design of reflective wave strip sheet with single-stage diffraction characteristic and manufacturing method thereof

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Embodiment

[0037] To this end, this embodiment discloses a reflective strip plate with single-order diffraction characteristics suitable for the soft X-ray band, refer to figure 1 and figure 2 shown, including:

[0038] 1) Transparent silicon carbide substrate;

[0039] 2) Forming a plurality of circular high-reflectivity element arrays with two-dimensional distribution on a transparent substrate. figure 1 Shown is a partial structure diagram of the reflective zone plate 60 ring with single-order diffraction characteristics of the present invention, in which the circular primitives with variable radius filled in white are high reflectivity primitives. The black areas are transparent films. figure 2 It is a schematic diagram of the structural design of the present invention. The circular structure in the figure is the primitive described in the present invention, and the ring line is the elliptical ring line of the zone plate. The primitives are randomly distributed among the ring li...

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Abstract

The invention discloses a design of a reflective wave strip sheet with a single-stage diffraction characteristic and a manufacturing method thereof. The reflective wave strip sheet comprises a transparent substrate; and multiple high-reflectivity circular elements which are formed on the aforementioned transparent substrate. The aforementioned circular elements are randomly distributed in elliptical rings of the reflective wave strip sheet and are not intersected. Radiuses of the circular elements change along with size of width of the elliptical rings. The range of the radiuses of the elements arranged between the (n-1)th and nth (n is an integer greater than 1) rings is [rnmax, rnmin], wherein rnmax=(an-an-1) / 2, rnmin=(bn-bn-1) / 2, an in the formula is the long axis of the nth ring line, and bn is the short axis of the nth ring line. The reflective wave strip sheet only has zero-order and positive and negative one-order diffraction so that high-order diffraction can be effectively inhibited and harmonic pollution can be eliminated. Meanwhile, the reflective wave strip sheet has a binary structure characteristic so that the reflective wave strip sheet is easy to manufacture and realize. The reflective wave strip sheet with the single-stage diffraction characteristic has characteristics of integrating dispersion, focusing and higher harmonic inhibition so that the reflective wave strip sheet can act as an optical element for leading edge science, such as soft X-ray light source focusing, monochromatization and spectral analysis.

Description

technical field [0001] The invention relates to reflective zone plate technology, more specifically, to a design and manufacturing method of a reflective zone plate with single-order diffraction characteristics. Background technique [0002] In 1871, Rayleigh invented the Fresnel zone plate (FZP, Fresnel Zone Plate) (Optics, Addison-Wesley, E.Hecht and A.Zajac), based on the Fresnel transmission with the optical path of adjacent rings being λ / 2 The zone plate is a classic optical element. The characteristics of the element are similar to the focusing and imaging functions of the lens, but its properties are superior to those of the lens. It has low cost, easy fabrication, large area, light weight, and foldable And other characteristics, it plays an extremely important role in the fields of long-distance optical communication, optical ranging and aerospace technology. In particular, its two characteristics are unmatched by traditional lenses: one is that the focal length has...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
Inventor 曹磊峰杨祖华魏来张强强谷渝秋张保汉
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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