Hollow buffer drive

A buffer-driven, hollow technology, applied in the direction of fluid pressure actuators, injection devices, pipe supports, etc., can solve the problems of exposure to the external environment and complex overall structure

A buffer-driven, hollow technology, applied in the direction of fluid pressure actuators, injection devices, pipe supports, etc., can solve the problems of exposure to the external environment and complex overall structure

CN104864190BActive Publication Date: 2017-05-17SCIENTECH
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  • Hollow buffer drive

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0071] Please refer to figure 1 , which shows a perspective view of a hollow buffer driving device 1 according to an embodiment of the present invention. The hollow buffer driving device 1 includes a base 10 , a lift mechanism unit 12 , a rotation mechanism unit 14 , and a pipeline support unit 16 . Wherein, the lifting mechanism unit 12 is rotatably mounted on the base 10 ; the rotating mechanism unit 14 is mounted on the base 10 for rotating the lifting mechanism unit 12 ; the pipeline support unit 16 is mounted on the lifting mechanism unit 12 .

[0072] Please refer to Figure 2A , which shows a cross-sectional view of the lifting mechanism unit 12 according to an embodiment of the present invention. The lifting mechanism unit 12 has a cylinder body 20 and a piston rod 30; the cylinder body 20 has a housing 22, and the housing 22 defines a cylinder body space 200; the piston rod 30 has a handle 32, and the handle 32 is hollow to A handle space 36 is defined and passes ...

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Abstract

The present invention provides a hollow buffer driving device, comprising a lifting mechanism unit having a cylinder body and a piston rod, wherein the cylinder body has a housing which defines a cylinder body space, the piston rod has a handle part and a head part, the handle part is hollow so as to define a handle part space, and penetrates one end or two ends of the housing, the head part is fixedly connected to the handle part, and is arranged in the cylinder body space. Through the hollow design of the handle part of the piston rod of the lifting mechanism unit, the integral construction of the hollow buffer driving device is simpler and tighter.

Description

[0001] 【Technical field】 [0002] The present invention relates to an adjustment device, in particular to a hollow buffer driving device which is used for installing a delivery pipeline for delivering fluid and can adjust the outlet of the delivery pipeline to a target position, which can be applied to semiconductor wafers, The manufacturing process of flat substrates such as solar substrates, display glass substrates, LED substrates, etc., but not limited to these processes, and when using different chemicals in the manufacturing process for single-chip rotary etching, cleaning, drying, etc., carry liquid or gas supply To the top of the substrate, cooperate with the program-controlled lifting or left-right rotation coating or spraying mechanism. [0003] 【Background technique】 [0004] In the prior art, there are already many adjusting devices for fitting the conveying pipeline therein, and spraying the processing fluid in the conveying pipeline to the workpiece as required. ...

Claims

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Application Information

Patent Timeline
17 May 2017
Publication
CN104864190B
IPC
F16L3/16; F16L57/00; F15B15/22; B05B15/68
CPC
F15B15/22; F16L3/16; F16L57/00
Inventors
刘茂林