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A processing method of polysilicon tube target

A processing method and technology of polysilicon, applied in the direction of stone processing tools, stone processing equipment, manufacturing tools, etc., can solve the problems of difficulty in the production of tubular silicon targets, difficulty in cutting special shapes, high scrap rate, etc., and solve the problems of chipping and chipping Dangerous, overcoming brittleness, improving efficiency

Active Publication Date: 2018-06-12
QINGDAO BLUE LIGHT NEW MATERIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Polysilicon is a brittle material, and it is difficult and costly to cut special shapes
The production of tubular silicon targets is difficult, and the scrap rate is high

Method used

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  • A processing method of polysilicon tube target

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Embodiment Construction

[0011] In order to make the technical problem solved by the present invention, the technical scheme adopted and the technical effect achieved clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only parts related to the present invention are shown in the drawings but not all content.

[0012] Please refer to figure 1 , the processing method of the polysilicon tube target provided by the present embodiment comprises the following steps:

[0013] Firstly, the polysilicon ingot is removed from the skin, and cut into a certain size of rough ingot without cracks.

[0014] Then, the ingot is bonded to the steel plate, the steel plate is installed on the shelling equipment...

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Abstract

The invention discloses a machining method for a polycrystalline silicon cylindrical target. The machining method comprises the steps of placing an ingot casting on a band saw, cutting the ingot casting into a blank ingot of a certain size, bonding the blank ingot to a steel plate of a hollowing rod, placing the steel plate into cylinder hollowing equipment and forming an penetrating outer circle of a silicon cylinder in the blank ingot; adopting a diamond hollowing cylinder for replacement, and forming an penetrating inner circle of the silicon cylinder in the blank ingot; placing the silicon cylinder on a grinding machine for being ground and obtaining a silicon target cylinder with the size required by drawings. According to the machining method, a cylinder hollowing machine is adopted for forming penetrating holes in a polycrystalline silicon block fast, the machining time of the silicon cylinder is greatly shortened, and the production efficiency of the silicon cylinder is improved.

Description

technical field [0001] The invention relates to the technical field of polysilicon, in particular to a processing method for a polysilicon tube target. Background technique [0002] In the magnetron sputtering coating industry, the use efficiency of planar targets is low, about 30%, and the used targets are not easy to recycle; while the material utilization rate of tubular targets can reach about 80%, and the cutting remaining The material is easy to recycle. Therefore, the use of tubular targets can effectively increase the utilization rate of materials and prolong the service life of targets. [0003] Silicon target is also a kind of target material. Polysilicon is a brittle material, and it is difficult and costly to cut special shapes. The production of tubular silicon targets is difficult, and the reject rate is high. Contents of the invention [0004] In order to overcome the technical problems of the prior art that polysilicon special-shaped cutting is difficul...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D1/32
CPCB28D1/325
Inventor 张磊顾正张晓峰郭校亮
Owner QINGDAO BLUE LIGHT NEW MATERIAL CO LTD