92results about How to "Resolve fragmentation" patented technology

The invention relates to the field of thermal interface materials, and more particularly, provides a thermal grease composition, which contains the following components: (A) 100.0 parts by weight of thermally conductive filler, (B) 0.1 to 8.0 parts by weight of active solid silicone resin, (C) 0.1 to 15.0 parts by weight of active silicone oil, (D) 0.1 to 9.0 parts by weight of macromolecular polysiloxane, (E) 0.1 to 3.0 parts by weight of nano catalyst, and (F) 0.1 to 3.0 parts by weight of additive. The thermal grease composition provided by the invention has good thermal conductivity and using weatherability, can effectively solve the technical difficulty that the thermal grease composition in the prior art is pulverized and crushed and the thermal conductivity is therefore reduced as the service time increases. The manufacturing process has simple, convenient and easy steps and the thermal grease composition is suitable for large-scale match production.

Provided is an on-line detection system and method for a weld of a steel strip, which can emit a laser beam onto the surface of a steel strip moving at a high speed and measure the reflectivity of the laser beam reflecting from the same, thereby detecting the weld of the steel strip easily on-line. In the on-line detection system, reflectivity measuring means emits a laser beam onto a moving steel strip and continuously measuring the reflectivity of the laser beam returning from the surface of the steel strip, and signal processing means detects a weld of the steel strip based on change in the reflectivity measured on the weld.

The invention discloses a terminal protection method, a protection device, a terminal, and computer readable storage medium. A protection device comprising an electroactivity polymer is arranged in a terminal, the protection device does not bulge from the terminal when the terminal is not in the falling state, the use of the user cannot be influenced; when detecting that the terminal is in the falling state, an electric field is produced, so that the protection device bulges from the terminal to protect the security of the terminal; namely, the inventon provides a new terminal protection device, the problem that the appearance and the hand-feeling can be influenced when adopting a mobile phone protective shell to perform the protection is solved, and the problem that the mobile phone screen breaking and the internal component loosening still cannot be prevented even if the new material is used to perform the more hard protection on the mobile phone frame is further solved, and the use experience of the user is enhanced.

The invention provides a combined type magnetic core and a preparation method thereof. The method comprises the following steps: firstly, mixing powdery magnetic materials and a powdery adhesive agent in a presetting proportion so as to form a solid mixture; secondly, putting a column-shaped core material into a column-shaped holding mold of a mould; filling the mixture into the upper and the lower ends of the mould respectively so as to form a mold, or putting the mixture, an annular core material and the mixture into another mould in sequence; and subsequently, heating the mould or the solid mixture in another mould to enable the powdery magnetic materials to be mutually bonded through the powdery adhesive agent so as to be shaped at two ends of the column-shaped core material, or enable the powdery magnetic materials to be mutually bonded through the powdery adhesive agent so as to be wrapped outside the whole annular core material coaxially and form a through holes around the axis of the annular core material. Therefore, with the adoption of the preparation method, the magnetic cores containing more than two materials can be produced.

The present invention discloses a heterojunction solar cell and a preparation method thereof, wherein the cell comprises a crystalline silicon substrate, a first intrinsic amorphous silicon layer is arranged on the right side of the crystalline silicon substrate, and a first N-type amorphous silicon layer and a first P-type amorphous silicon layer are arranged on the first intrinsic amorphous silicon layer; a first negative electrode is arranged on the first N-type amorphous silicon layer, and a first positive electrode is arranged on the first P-type amorphous silicon layer; a second intrinsic amorphous silicon layer is arranged on the reverse side of the crystalline silicon substrate and is equipped with a second N-type amorphous silicon layer and a second P-type amorphous silicon layer,a second negative electrode is arranged on the second N-type amorphous silicon layer, and a second positive electrode is arranged on the second P-type amorphous silicon layer. According to the heterojunction solar cell provided by the present invention, by arranging the positive electrodes and the negative electrodes both on the right side and the reverse side of one crystalline silicon substrate, the adjacent two cell chip assemblies can be connected in series by a smaller solder strip, thereby reducing the series resistance, and improving the photoelectric conversion efficiency.

The invention relates to a silicon-chromium-boron alloy antiwear ball and a production method thereof. The silicon-chromium-boron alloy antiwear ball is characterized by comprising the following chemical compositions: 2.5 to 2.7 percent of C, 1.1 to 1.3 percent of Si, 1.6 to 2.0 percent of Mn, 0.8 to 1.5 percent of Cr, less than or equal to 0.05 percent of P, less than or equal to 0.05 percent of S, 0.0015 to 0.003 percent of B, and the balance being Fe. The method for producing the silicon-chromium-boron alloy antiwear ball comprises the following steps: smelting, shaping, lifting, balling and heat treating. The silicon-chromium-boron alloy antiwear ball produced by the method solves the problem of grinding ball crack, and improves surface quality and wear resistance of a cast ball.

The invention discloses a tunnel-type maofeng tea baking machine, comprising a rack and a baking tunnel arranged on the rack, wherein the two sides of the baking tunnel are respectively of a closed structure, and a heating device is arranged at the top of the baking tunnel; a tea leave conveyor belt is arranged at the bottom of the baking tunnel, and a supporting plate clinging to the tea leaf conveyor belt is arranged below the conveying section of the tea leaf conveyor belt; and the tea leaf conveyor belt is of a nonmetallic flat wire knitted structure, and is driven by a power mechanism, and the two ends of the tea leaf conveyor belt are respectively a tea leaf feed end and a tea leaf discharge end. The tunnel-type maofeng tea baking machine effectively solves the problems that according to the channel-type tea leaf drying machine in the prior art, a wire belt distorts and deviates, the tea leaves are easily clamped, the drying temperature is single, and the fragrance of maofeng tea is inadequate. The tunnel-type maofeng tea baking machine provided by the invention has the advantages of stable and secure running, less dust pollution, no damage to the tea leaves, fragrant flavorof the finished product of the maofeng tea, high level of quality, and very high popularization value.

The invention discloses a first-order buoyancy magnetic liquid damping vibration absorber for magnetic shielding, and belongs to the field of mechanical engineering vibration. The problem that existing magnetic liquid damping vibration absorbers cannot be applied in engineering practice due to various structural problems is successfully solved. The first-order buoyancy magnetic liquid damping vibration absorber comprises a shell (1), an upper shielding cover (2), an upper permanent magnet (3), a mass block (4), a lower permanent magnet (5), a lower shielding cove (6) and magnetic liquid (7). When external vibration is produced, the mass block (4) moves in the upper shielding cover and the lower shielding cover, the magnetic liquid (7) flows in the gap between the upper and lower permanent magnets and the mass block (4), and therefore energy is absorbed to achieve the vibration absorption purpose; and a frequency difference is formed between the mass block (4) and the shell (1) due to first-order buoyancy formed by the upper permanent magnet (3) and the lower permanent magnet (5) inside the magnetic liquid (7), and the vibration absorption efficiency reaches the maximum.

A magnetic fluid acceleration sensor based on a first-order buoyancy principle belongs to the field of mechanical engineering measurement. The problem that the existing magnetic fluid acceleration sensor cannot be applied in engineering practice due to a variety of structure problems is solved successfully. The device comprises a first permanent magnet (1), a shell (2), a mass block (3), an end cover (4), a second permanent magnet (5), magnetic liquid (6), an upper coil (7), and a lower coil (8). When acceleration is produced outside, the nonmagnetic mass block moves in a cavity, the volume distribution of the magnetic liquid (6) in the shell (2) changes, a signal is output, and first-order buoyancy formed by the first permanent magnet (1) and the second permanent magnet (5) inside the magnetic liquid (6) causes frequency difference between the mass block (3) and the shell (2). Thus, the sensitivity of the sensor is improved.

The invention relates to a first-order buoyancy principle based magnetic liquid damping shock absorber with magnetic shielding covers, belongs to the field of mechanical engineering vibration, and successfully solves the problem that the existing magnetic liquid damping shock absorbers cannot be applied in engineering practice due to various structural problems. The absorber comprises a first permanent magnet (1), a housing (2), a mass (3), an end cap (4), a second permanent magnet (5), magnetic fluid (6), an upper magnetic inner sleeve (7), an upper magnetic shielding outer sleeve (8), a lower magnetic inner sleeve (9) and a lower magnetic shielding outer sleeve (10). When the external vibration occurs, a non-magnetic ball moves in a chamber, the magnetic fluid flows in a recess of the housing (2) to absorb energy, first-order buoyancy formed within the magnetic fluid by the first permanent magnet (1) and the second permanent magnet (5) allows frequency difference to be formed between the mass (3) and the housing (2), so that the maximum vibration damping efficiency is achieved, and the upper and lower magnetic shielding covers effectively prevent magnetic flux leakage of the permanent magnets.

The invention provides a method and a device for measuring thickness of a wafer. The method is characterized in that the wafer is kept in a vertical state during measurement and a vacuum chuck is also arranged vertically, so that the gravity of each point on the surface of the wafer is parallel to the surface of the wafer under the condition that the wafer is adsorbed. According to the invention, the problems of the surface damage and the surface fracture of the wafer easily caused by adopting a contact probe in the existing wafer for the vertical measurement, as well as the problems that the measurement accuracy of the non-contact measurement for transparent materials and surface high-brightness materials cannot meet market requirements and the like, are solved.

The invention discloses an aluminum alloy plate material continuous extrusion method taking bar materials as blanks, and a continuous extrusion machine. The method comprises the following steps: A, dividing the blanks into multiple sections of bar materials, and connecting the head end face of the front-back adjacent bar materials with the tail end face of the front-back adjacent bar materials in each section of bar material; B, performing induction heating on the connected bar materials under the protection of inert gas through an induction device; and C, feeding heated bar materials into a rotary extrusion wheel, pressing the bar materials into a groove of the extrusion wheel through a pressing wheel, driving the bar materials through the groove in the extrusion wheel to enter a cavity and extruding to form a product through an extrusion mold in the cavity. According to the continuous extrusion method and the continuous extrusion machine, the problem that remarkable defects exist at the head-tail connection position of the bar materials during continuous extrusion of the magnesium alloy bar materials is solved; and the temperature of the magnesium alloy is increased by adopting induction heating under the protection of the inert gas, so the problems that the magnesium alloy has low plasticity at normal temperature and is broken when being pressed by the pressing wheel are solved.

The invention discloses a cooling system in a 3D (three dimensional) curved glass hot pressing device and a cooling method. An apparatus comprises a molding chamber, a first cooling module and a liquid cooling passage, wherein the first cooling module penetrates through the molding chamber and is used for cooling a molded product in a heat transferring manner and also stably maintaining the pressure; and the liquid cooling passage is communicated with the molding chamber and used for continuously cooling the stably-pressure-maintained molded product. By adopting the cooling system in the 3D curved glass hot pressing device provided by the invention, after the molded product is stably pressure maintained by the first cooling module, the molded product can be continuously cooled by virtue of the liquid cooling passage, so that after 3D curved glass of a smart phone is molded by adopting the hot pressing device, the problem of product cracking caused by the sharply-cooling of a liquid cooling plate can be effectively solved.

The invention provides a formation method of a semiconductor device. The formation method is characterized by comprising the following steps: providing a first wafer and a second wafer, and enabling the first wafer to be in bonding connection with the second wafer; performing edge-trimming treatment on the second wafer so as to remove the arc curved surface structure on the periphery of the second wafer; performing primary attrition treatment on the back surface of the second wafer so as to reduce partial thickness; fixing a third wafer on the back surface of the second wafer subjected to primary attrition treatment; after performing edge-trimming treatment on the second wafer to remove the arc curved surface structure on the side wall of the second wafer, preventing a suspended structure from being formed at the edge of the second wafer during the primary attrition treatment on the back surface of the second wafer, thereby solving the problem that the second wafer, when pressed during attrition, cracks at the edge due to the suspended structure formed at the edge, and improving the quality of the second wafer after attrition as well as the performance and the finished product rate of semiconductor devices formed subsequently.

The invention discloses a ceramic substrate continuous laser cutting device and a ceramic substrate continuous laser cutting method, and relates to ceramic substrate cutting. According to the characteristics of a continuous silicon carbide film substrate, by utilizing a transmission device and laser cutting device combined mode, the continuous silicon carbide film substrate is cut under laser irradiation. In addition, with the combination of the characteristics of a ceramic film, certain pressure is applied to the two sides of a substrate cutting place through sponge, the continuous silicon carbide film substrate is endowed with certain intensity and the stress buffering function is played, so that the fragmentation problem of the continuous silicon carbide film substrate in the cut-off instant is solved, the continuous silicon carbide film substrate does not shift during cutting, and cut marks are burr-free. Under the driving of a transmission device, the continuous silicon carbide film substrate can be subjected to continuous cutting, so that automatic mechanical operation is realized, and the cutting efficiency is improved substantially. By replacing chain plates at different lengths, multiple continuous silicon carbide ceramic film substrates can be cut into the sizes required by components, so that an application of the continuous silicon carbide ceramic film substrates inpower-type semiconductor component packaging is realized.

An anti-differential settlement inspection well device comprises a well cover (1) and a well body (2), wherein a support plate (3) is arranged below the well cover (1), a well cover placing hole (31) is formed in the support plate (3), and the area of the support plate (3) opposite to a well body upper opening (21) is at least greater than that formed by the outer edge of the well body upper opening (21); the support plate (3) is located above the well body upper opening (21), and the lower surface of the support plate (3) is separated from the well body upper opening (21); cushion blocks (4) are arranged below the outer edge of the support plate (3) in a way of supporting the outer edge of the support plate (3); and the cushion blocks (4) partially extend out of the outer edge of the support plate (3). Even if under the long-term and repeated action of load of vehicles, the inspection well device can always avoid differential settlement generated between the well cover and / or the well body and circumjacent roads. In addition, the invention further provides a construction method of the anti-differential settlement inspection well device.

The invention discloses a method for preparing controllable shallow oxidized paraffin and belongs to the technical field of oxidized paraffin preparation. Firstly, microorganisms in oil-containing sludge of an oil refinery are subjected to culture and enrichment to obtain a culture solution, then paraffin and microcrystalline wax are mixed and fused, the mixture is added dropwise and dispersed in the culture solution in the high-speed stirring state, mixing, fermentation and activation are conducted, toughness of raw material paraffin is improved so that paraffin can not crack easily, then washed wet powder is mixed with calcium oxide for drying, calcium hydroxide is generated and used for improving hardness of a product, then compressed air serves as weak oxidant under the catalytic condition of manganese stearate, and paraffin is oxidized to prepare the controllable shallow oxidized paraffin through injection molding and curing. The method has the advantages that the obtained product is good in toughness, hardness is as high as 6-10 H, mixing, fermentation and activation of the mixed paraffin and the culture solution are fully used, calcium oxide is added to improve toughness and hardness, pertinence is high, and the problem that breaking happens under the action of external force is effectively solved.

The invention discloses an automatic production complete plant for Maofeng tea. The automatic production complete plant comprises a continuous rotary-drum type de-enzyming machine, an automatic tea management machine and a tunnel drier, all of which are mutually connected, wherein the tunnel drier comprises a stand and a drying tunnel, the drying tunnel is arranged on the stand, two sides of the drying tunnel are of sealing structures, the top of the drying tunnel is provided with a heater, and the bottom of the drying tunnel is provided with a tea conveyer belt. The automatic production complete plant for the Maofeng tea further comprises an automatic control system which is connected with and controls all machining devices on the automatic production complete plant. The automatic production complete plant disclosed by the invention effectively solves problems that the machining of the Maofeng tea is dispersive, the quality of the Maofeng tea is irregularly and labor and device resources are waste during present Maofeng tea production. The automatic production complete plant for the Maofeng tea, disclosed by the invention, has the advantages of high automation degree, stability and safety in operation, small dust pollution, no damage on the Maofeng tea, and Maofeng tea finished products have fragrant flavor and high quality grade, thus being high in promotion value.

The invention discloses a high-nickel nickel-cobalt-manganese ternary single crystal material as well as a preparation method and application thereof. The general formula of the high-nickel nickel-cobalt-manganese ternary single crystal material is set to be LiNixCoyMnzRtO2, wherein x is more than or equal to 0.5 and less than or equal to 0.8, y is more than or equal to 0.1 and less than 0.3, z ismore than 0.1 and less than or equal to 0.2, and t is more than 0 and less than to 0.1. Sulfate ions are not introduced, so that washing water is not required. Thus, washing water does not need to beused, and pH control is not needed in a production process.

The invention is applicable to the technical field of a camera, and provides a lightweight and thin module and a manufacturing method thereof, a camera and an electronic device. The module comprises acircuit board, an image sensor, a middleware and an optical filter, wherein the optical filter is directly fixed on the top surface of the photosensitive area of the image sensor. The embodiment eliminates the base in the prior art and directly fixes the filter on the top surface of the photosensitive area of the image sensor, thereby saving components and reducing the filter attaching process, and avoiding the problem of tilting the base and the middleware in the installation process. As for that module design, since there is no base, the space of the module in the vertical direction is saveby 0.3 to 0.5 mm, so that the module is lighter and thin. In addition, since the image sensor itself is fixed on the circuit board, the image sensor can provide sufficient bearing strength to the filter, thereby improving the bearing capacity of the module when impacted by external forces, and making the filter not easy to fall off or break.

The invention relates to a cylindrical first-order buoyancy magnetic liquid vibration absorber, and belongs to the field of mechanical engineering vibration. The cylindrical first-order buoyancy magnetic liquid vibration absorber successfully solves the problem that an existing magnetic liquid clamping vibration absorber cannot be applied in engineering practice caused by multiple structures. The cylindrical first-order buoyancy magnetic liquid vibration absorber comprises a first limiting permanent magnet (1), a shell (2), an upper V-shaped armature (3), the magnetic liquid (4), a mass block (5), a second limiting permanent magnet (6), a lower V-shaped armature (7), a first suspension permanent magnet (8), a second suspension permanent magnet (9), a third suspension permanent magnet (10) and a fourth suspension permanent magnet (11). When the outer side words vibrated, the mass block (5) moves in a cavity, and the magnetic liquid (4) flows in a gap between the inner hole wall of the shell (2) and the mass block (5), so that energy is absorbed, and the purpose for reducing vibration is achieved.

A cylindrical first-order buoyancy magnetic liquid acceleration sensor belongs to the field of mechanical engineering vibration, and successfully solves the problem that conventional magnetic liquid acceleration sensors cannot be applied in engineering practice due to a plurality of structure problems. The cylindrical first-order buoyancy magnetic liquid acceleration sensor comprises a first limiting permanent magnet (1), a housing (2), an upper V-shaped armature (3), magnetic liquid (4), a mass block (5), a second limiting permanent magnet (6), a lower V-shaped armature (7), a first suspension permanent magnet (8), a second suspension permanent magnet (9), a third suspension permanent magnet (10), a fourth suspension permanent magnet (11), a second induction coil (12), and a first induction coil (13); when there is an acceleration signal in the outside world, the mass block (5) moves in a cavity, volume distribution of the magnetic liquid (4) in the housing (2) changes, so that the second induction coil (12) and the first induction coil (13) detect and output inductance signals.

The invention discloses a piston-type first-order buoyancy magnetic liquid inertial sensor, which belongs to the vibration field of mechanical engineering, and successfully solves the problem that the existing magnetic fluid acceleration sensor cannot be applied in engineering practice due to various kinds of structure problems. The piston-type first-order buoyancy magnetic liquid inertial sensor comprises a first suspended permanent magnet (1), a first limiting permanent magnet (2), a shell body (3), a magnetic liquid (4), a limiting shell (5), a second limiting permanent magnet (6), a second suspended permanent magnet (7), a second induction coil (8), a first induction coil (9) and a mass (10). When an acceleration signal exists in the outside world, the mass assembly moves within a cavity body, the volume distribution of the magnetic liquid (4) in shell body (3) changes, thus the second induction coil (8) and the first induction coil (9) detect electrical inductance signals and output the electrical inductance signals.

The invention discloses drying equipment for flos chrysanthemi indici. The drying equipment comprises a drying box and a control cabinet; an exhaust pipe is arranged on the top of the drying box; a humidity sensor is arranged on the right side surface of the exhaust pipe; a plurality of shelves are arranged in the drying box; a temperature sensor is arranged at the left upper corner in the drying box at the same time; a display screen is arranged at the upper part of the control cabinet; a function key is arranged on the right side of the display screen; a single chip microcomputer is arranged under the function key; and a fan is arranged at the right lower corner of the bottom of the control cabinet. By adopting the drying equipment provided by the invention, by arranging the shelves, the flos chrysanthemi indici is placed on each shelf and is dried so as to be ensured to be wholly dried; by arranging the temperature sensor and the humidity sensor to be matched with the display screen, the temperature and the humidity in the drying box are grasped in real time; and meanwhile, by matching the arranged single chip microcomputer with the function key, the temperature and the humidity in the drying box can be regulated and controlled so as to be controllable, and efficient and accurate drying of the flos chrysanthemi indici is faciliated.

The invention relates to a coating material for improving the low temperature explosion performance of a PVC slush molded skin, and a spraying method thereof. The coating material comprises 70-87% of aqueous polyurethane, 5-20% of a color paste, 0.5-6% of a film forming assistant, 0.05-0.5% of an antifoaming agent, 0.1-0.8% of a wetting agent, 0.05-1% of a thickener, and the balance of water. The spraying method concretely comprises the following steps: (1) blending components of the coating material according to proportioning requirements to prepare the coating material; (2) adding a proper amount of the mixed coating material into a spray gun; and (3) preheating a slush molded skin in a 50-80 DEG C heating furnace for 3-15 min, removing the heated skin, arranging the heated skin on a fixing clamp in a back up manner, fixing and flattening an airbag area, uniformly spraying the prepared coating material on the back side of the skin complete airbag area by the spray gun, and allowing the coating layer to be completely dry. When the coating material is sprayed on the B surface of the PVC slush molded skin, the problems of difficult construction of a pure polyurethane coating and fragmentation of the PVC slush molded skin at a low temperature are solved.

The invention relates to an intracranial vascular pincers type thrombus take-out device in the field of medical apparatuses. When a vascular thrombus take-out support is bent, the side face of the near end of the vascular thrombus take-out support is bent to form a first large mesh hole; a second large mesh hole is formed in a unit mesh opposite to the first large mesh hole, and the area of the second large mesh hole is larger than the area of the unit mesh; the vascular thrombus take-out support is matched and provided with a plurality of developing marks. A conveying system comprises a conveying guide wire, a protection sheath, a miniature guide pipe, a guiding guide pipe, a front Y-type valve and a rear Y-type valve. The conveying guide wire is connected with the near end of the vascular thrombus take-out support. The vascular thrombus take-out support is arranged in the protection sheath. The protection sheath is connected with the tail portion of the miniature guide pipe through the rear Y-type valve. The front portion of the miniature guide pipe is directly connected with the guiding guide pipe through the front Y-type valve. By means of the thrombus take-out device, the problems of breakage and escape of thrombi in the capturing and take-out process by means of an existing thrombus take-out device and technology can be solved, the sliding and rolling probability of thrombi stably clamped by pincers is remarkably reduced, and the operative successful rate is increased.

The invention relates to an integrated multichannel superconducting filter component, which belongs to the technical field of superconducting filters. The component comprises a printed circuit board, a superconducting chip and an amplifier chip which are sequentially integrated on an identical base of a shielding box; N superconducting filters are integrated on the superconducting chip; N low-noise amplifiers and an N to 1 microwave switch are integrated on the amplifier chip; a 1 to N microwave switch is integrated on the printed circuit board so as to form an N-channel superconducting filter component; the output terminal of the 1 to N microwave switch is connected with input terminals of the N superconducting filters respectively; the output terminals of the N superconducting filters are respectively connected with the input terminals of the N low-noise amplifiers; and the output terminals of the N low-noise amplifiers are connected with the input terminal of the N to 1 microwave switch respectively. The superconducting filter component can effectively reduce the noise factor and improve the rate of finished products, is compact in structure, and is convenient for integration.

The invention discloses an anti-settlement combined type assembled road inspection well lid which comprises a concrete base plate, a well loop and a reinforcing mesh rack, wherein a well lid body is arranged in the well loop; the anti-settlement combined type assembled road inspection well lid is characterized in that the reinforcing mesh rack comprises at least two layers of reinforcing meshes arranged up and down; two adjacent layers of reinforcing meshes are connected through a plurality of inclined supporting ribs; the well loop is located on the upper surface of the reinforcing mesh rack, and the lower part of the well loop is buried in the concrete base plate; the well loop is connected with the reinforcing mesh rack through a plurality of connection ribs. The anti-settlement combined type assembled road inspection well lid has the beneficial effects of firm integral structure and high compressive strength, and can realize quick maintenance and quick replacement and avoid secondary settlement after replacement; the problems of breakage and fragmentation of the periphery of the road inspection well lid due to settlement of the road inspection well loop and the well lid and vibration caused by vehicle rolling can be solved; the attractiveness of an urban road is improved, and the safety of vehicles running on the road is improved.

The invention provides a 3-5[mu]m infrared band avalanche photodiode detector (APD) and a production method thereof. The infrared band APD comprises an antireflective film layer, a P+ type InSb electrode contact layer, an N type InSb layer, a P type epitaxial Si layer and an N+ type Si layer which are stacked from top to bottom, wherein the N type InSb layer is taken as an absorption layer, the Ptype epitaxial Si layer is taken as a multiplication layer, and the N type InSb layer and the P type epitaxial Si layer are an N type InSb layer and a P type epitaxial Si layer in an InSb / Si bonded wafer respectively. Therefore, absorption of InSb on infrared band lights is high, difference between electron ionization rate and hole ionization rate of an epitaxial Si material is relatively large, an excess noise factor of the epitaxial Si material is small, and multiplication performance with lower noise can be obtained; compared with the circumstance that the multiplication layer is InSb, noise of an InSb / Si APD device can be lowered, responsibility of an APD detector is improved, and high-speed and low-noise photoelectric detection effect can be realized by virtue of combination of the Ntype InSb layer as a relatively narrow absorption layer and the P type epitaxial Si layer as a narrow multiplication layer; meanwhile, the InSb / Si bonding wafer is used, so that thermal mismatch witha Si reading circuit is reduced.

The invention provides semiconductor process equipment and an electrostatic chuck assembly thereof, the electrostatic chuck assembly comprises an electrostatic chuck and a temperature control base, the electrostatic chuck is arranged on the temperature control base and fixedly connected with the temperature control base, and the electrostatic chuck assembly is characterized in that the electrostatic chuck comprises an electrode and a dielectric layer wrapping the electrode; a temperature control channel is formed in the temperature control base, the temperature control base is made of a metal-based ceramic particle reinforced composite material, and the ratio of a metal matrix to ceramic particles in the composite material is adjusted to a preset value, so that the difference between the thermal expansion coefficient of the temperature control base and the thermal expansion coefficient of the dielectric layer is lower than a preset threshold value. According to the invention, the problems of low heat conduction efficiency, vacuum leakage and the like caused by the existence of an adhesive layer in the prior art can be solved.