A kind of ti-al-mo-n multi-component hard gradient film and its preparation method and application

Abstract

The invention relates to a Ti-Al-Mo-N multi-component hard gradient film as well as a preparation method and application thereof, and belongs to the technical field of special material preparation. The Ti-Al-Mo-N multi-component hard gradient film comprises the following components in percentage by mass: 55-85% of Ti, 8-30% of Al, 4-15% of Mo and 3-25% of N. Through arc ion plating, the Ti-Al-Mo-N multi-component hard gradient film can be prepared into a coating with a substrate / TiN / Ti-Al-Mo-N, and the coating can be applied to the fields of papermaking and printing. The preparation method provided by the invention is reasonable in component design, simple in technology, and convenient for large-scale application, especially the large-scale application to the field of printing.

Description

technical field

[0001] The invention relates to a Ti-Al-Mo-N multi-component hard gradient film and a preparation method and application thereof; it belongs to the technical field of preparation of special materials. Background technique

[0002] Arc ion plating is to trigger the ignition arc between the cathode and the anode. The arc discharge is only carried out at one or several dense arc spots on the surface of the target. The whole moving target is consumed evenly. In cathodic arc deposition, the deposition material is evaporated by the action of vacuum arc. In the arc line, the source material is used as the cathode. Most of the basic processes of the arc occur at the arc point in the cathode area. The typical size of a few micrometers, and have a very high current density. The evaporated product obtained by arc evaporation consists of electrons, ions, neutral gas phase atoms and particles. The plasma is directly generated from the cathode without a molten pool, and ...