Online pollution monitoring system and method

A pollution monitoring and main system technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as system reliability or efficiency reduction, unsuitable topology, etc., to ensure reliability and efficiency , to ensure the effect of accuracy

Active Publication Date: 2018-03-27
NVISANA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is a problem that this topology cannot be applied when the reliability or efficiency of the system for transferring the sample collected as described above to the analyzer for analysis decreases.

Method used

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  • Online pollution monitoring system and method
  • Online pollution monitoring system and method

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Embodiment Construction

[0030] Embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art of the present invention can easily implement the present invention. However, the present invention can be realized in various forms, and is not limited to the embodiments described here. In addition, in the drawings, in order to clearly describe the present invention, parts irrelevant to the description are omitted, and similar names and reference numerals are used for similar parts throughout the specification.

[0031] figure 1 It is a drawing illustrating the overall topology of the online pollution monitoring system of the present invention.

[0032] An online pollution monitoring system according to an embodiment of the present invention includes: a plurality of sampling units 200, distributed; a main system 200, radially connected to a plurality of sampling units 200 distributed through a transmission line 200; a transmis...

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Abstract

The invention relates to an online pollution monitoring system and an online pollution monitoring method. The online pollution monitoring system provided by the invention is characterized by comprising sampling units (100) and a main system (200), wherein the sampling unit (100) imports a chemical product via a line connected with a point using, storing or supplying the chemical product, and generates a transmission sample to be transmitted; the main system (200) receives the transmission sample from the sampling unit and performs analysis via an analyzer; the main system is connected with transmission lines (300) in a radial manner via a plurality of dispersedly arranged sampling units, and in the transmission lines, non-reactive gases of the transmission sample are in the front and back,so as to be transmitted in a packaged manner.

Description

technical field [0001] The present invention relates to an on-line pollution monitoring system and method, and more particularly to a system and method for real-time on-line monitoring of chemical product pollution used in semiconductor manufacturing processes and the like. Background technique [0002] At present, in cutting-edge manufacturing industries such as semiconductor manufacturing processes, extremely small amounts of pollution are the most important reasons for yield and productivity. Thus, in the production process, when an extremely small amount of pollution source is analyzed in real time, it is possible to improve yield and productivity by preventing a large number of defects caused by pollution. [0003] However, the production equipment of the semiconductor and other manufacturing industries is scattered on a large-scale production line, and the chemical manufacturing industry also has long distances between tanks, so the points that need to monitor chemical...

Claims

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Application Information

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IPC IPC(8): H01L21/67
CPCH01L21/67253
Inventor 田弼权成墉益朴准虎朴泓荣
Owner NVISANA
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