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Single and dual axis magnetic field sensor, preparation method thereof and equipment

A magnetic field sensor, uniaxial technology, which is applied in the manufacture of single equipment, the size/direction of the magnetic field, and the use of electromagnetic devices for magnetic field measurement, etc. The effect of simple process and low manufacturing cost

Inactive Publication Date: 2019-04-16
QINGDAO RES INST OF BEIHANG UNIV
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  • Abstract
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Problems solved by technology

[0004] The present application provides a single-axis and double-axis magnetic field sensor and its preparation method and equipment, so as to reduce the problems such as the complicated preparation process of the single-axis magnetic field sensor in the prior art

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  • Single and dual axis magnetic field sensor, preparation method thereof and equipment
  • Single and dual axis magnetic field sensor, preparation method thereof and equipment
  • Single and dual axis magnetic field sensor, preparation method thereof and equipment

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Embodiment Construction

[0060] In order to enable those skilled in the art to better understand the solutions of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application.

[0061] Some processes described in the specification, claims, and the above-mentioned drawings of the present application include multiple operations appearing in a specific order, and these operations may be performed out of the order in which they appear in this document or performed in parallel. The sequence numbers of operations such as 101 and 102 are only used to distinguish different operations, and the sequence numbers themselves do not represent any execution order. In addition, these processes may include more or fewer operations, and these operations may be executed sequentially or in parallel. It should be noted that the descriptions of "first" and "second" in this a...

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Abstract

The embodiment of the invention provides a single and dual axis magnetic field sensor, a preparation method thereof and equipment. The single axis sensor comprises a first Wheatstone bridge located ona substrate, the first Wheatstone bridge comprises two first magnetoresistive module groups and two second magnetoresistive module groups; the two first magnetoresistive module groups are located onfirst opposite bridge arms of the first Wheatstone bridge, and the reference layer magnetization directions of first magnetoresistive modules in each first magnetoresistive module group are the same with the first direction of the first sensing axis of the single-axis magnetic field sensor; the two second magnetoresistive module groups are located on second opposite bridge arms of the first Wheatstone bridge, and each second magnetoresistive module group includes two second magnetoresistive modules connected in series; the angle bisector of a first included angle formed by the reference layermagnetization directions of the two second magnetoresistive modules is parallel to the first sensing axis; the first included angle is greater than 0 and smaller than 180 degrees; and the reference layer magnetization directions of the first magnetoresistive module and the second magnetoresistive module are perpendicular to respective easy magnetization axes. According to the technical scheme, thecomplexity of the preparation process of the single-axis magnetic field sensor can be reduced.

Description

Technical field [0001] This application relates to the field of semiconductor technology, and in particular to a single-axis and dual-axis magnetic field sensor and its manufacturing method and equipment. Background technique [0002] Magnetic field sensors are mainly used to detect the presence, strength, direction and change of the magnetic field. In addition to directly measuring the magnetic field, magnetic field sensors also provide a wide range of solutions for the measurement of other physical quantities, such as current, linear displacement, linear velocity, angular displacement, angular velocity, acceleration, etc. At present, the types of magnetic field sensors that have been used include Hall sensors, anisotropic (AMR) sensors, giant magnetoresistance (GMR) sensors, tunneling magnetoresistance (TMR) sensors, and so on. [0003] At present, when manufacturing a single-axis magnetic field sensor, a half Wheatstone bridge structure is usually used. In the prior art, the s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/10G01R33/06G01R33/09
CPCG01R33/0052G01R33/063G01R33/093G01R33/096G01R33/10
Inventor 郭宗夏曹志强闫韶华安琪冷群文赵巍胜
Owner QINGDAO RES INST OF BEIHANG UNIV
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