A 3D printing-assisted ion beam polishing method

A 3D printing and ion beam technology, which is applied to optical components, household appliances, and other household appliances, can solve the problems of low processing precision, low precision, and poor uniformity of sacrificial layer thickness, achieving good certainty, expanding the scope of application, The effect of high surface machining accuracy

Active Publication Date: 2020-10-13
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

It has good applicability to planar and spherical components, but there are some shortcomings in the manufacture of aspheric sacrificial layers: high manufacturing cost and low precision of aspheric molds; poor uniformity of sacrificial layer thickness, and accuracy Low
After the initial manufacture of the sacrificial layer, during the correction of the sacrificial layer, it is difficult to detect the accuracy of the sacrificial layer, and the machining accuracy is low, resulting in low accuracy of subsequent surface shape replication

Method used

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  • A 3D printing-assisted ion beam polishing method
  • A 3D printing-assisted ion beam polishing method
  • A 3D printing-assisted ion beam polishing method

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] see figure 1 , a flow chart of the steps of the 3D printing-assisted ion beam polishing method provided by the embodiment of the present invention, including the following steps:

[0039] Step S110: Perform interference detection on the optical mirror to be processed to obtain a mirror error, the mirror error being the deviation between the actual surface shape and the theoretical surface shape of the optical mirror to be processed.

[0040] Step S120:...

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Abstract

The 3D printing-assisted ion beam polishing method provided by the present invention uses 3D printing technology to make a high-precision sacrificial layer on the optical mirror surface to be processed, and then performs ion beam etching processing on the sacrificial layer to copy the surface shape accuracy of the sacrificial layer to On the optical mirror, break through the technical bottleneck of ion beam polishing technology on the low frequency removal ability of the mirror surface, improve the processing efficiency and processing accuracy of ion beam polishing optical mirror surface, especially aspheric surface, and expand the application range of ion beam polishing technology. The invention provides The 3D printing-assisted ion beam polishing method uses 3D printing technology to manufacture a mirror sacrificial layer. Compared with the existing processing methods such as spin coating and spray coating, the surface sacrificial layer made by 3D printing technology has better certainty and can be used according to the surface shape error. The characteristics are optimized and calculated, and the manufactured sacrificial layer is not affected by factors such as optical surface curvature changes and frequency band error distribution characteristics, and the surface shape processing accuracy is high.

Description

technical field [0001] The invention relates to the technical field of optical processing, in particular to a 3D printing-assisted ion beam polishing method. Background technique [0002] Ion beam polishing is a non-contact optical processing method, which is often used for the final precision polishing method of optical processing. Its main technical features are non-contact material removal, suitable for a variety of materials, no stress during processing, no edge effect, no copy effect, large positioning tolerance, and a Gaussian removal function with rotational symmetry. However, ion beam polishing has a low material removal rate and limited ability to correct high-frequency errors in the mirror. [0003] In order to effectively remove the medium and high frequency errors of the mirror surface, a sacrificial layer can be used to assist ion beam polishing to remove the medium and high frequency errors of the mirror surface. The technical route of this method is: first p...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): B29D11/00
CPCB29D11/00596B29D11/00961
Inventor唐瓦邓伟杰尹小林薛栋林张学军
OwnerCHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI