Silicon-based multimode 3dB beam splitter based on multimode interference coupler
A multi-mode interference and coupler technology, applied in the direction of instruments, light guides, optics, etc., can solve the problems of reduced output spot quality, and achieve the effects of easy expansion, reduced complexity, and good manufacturing tolerance
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[0044] The waveguide in Example 1 is a buried waveguide structure, and the height of the waveguide layer is 220nm; the width of the multimode input waveguide and the multimode output waveguide is 1 μm, and this value supports two modes TE 0 and TE 1 The typical value of the waveguide width; the multimode input waveguide includes the multimode input waveguide D1 and the multimode input waveguide D2;
[0045] In embodiment 1, the longitudinal spacing between the multimode input waveguides in the input area and the longitudinal spacing yin between the multimode output waveguides in the output area are equal, two input area tapered couplers and two output area tapered couplings The tapered length ltap of the filter is consistent, and the maximum width wtap of the tapered is equal; the two tapered couplers in the input area are the tapered coupler in the input area E1 and the tapered coupler in the input area E2;
[0046] Specifically, in Example 1, the pitch yin=2.76 μm, the tape...
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