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A silicon-based multimode 3db beam splitter based on multimode interference coupler

A multi-mode interference and coupler technology, used in instruments, light guides, optics, etc., can solve the problem of reducing the quality of the output light spot, and achieve the effects of easy expansion, good manufacturing tolerance and simple process

Active Publication Date: 2020-12-18
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the defects of the prior art, the object of the present invention is to provide a silicon-based multimode 3dB beam splitter based on a multimode interference coupler, aiming at solving the problem of high-order guided modes of the multimode interference coupler under the condition of multimode input. The problem that the excitation causes the quality of the output spot to decrease

Method used

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  • A silicon-based multimode 3db beam splitter based on multimode interference coupler
  • A silicon-based multimode 3db beam splitter based on multimode interference coupler
  • A silicon-based multimode 3db beam splitter based on multimode interference coupler

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Embodiment 1

[0044] The waveguide in Example 1 is a buried waveguide structure, and the height of the waveguide layer is 220nm; the width of the multimode input waveguide and the multimode output waveguide is 1 μm, and this value supports two modes TE 0 and TE 1 The typical value of the waveguide width; the multimode input waveguide includes the multimode input waveguide D1 and the multimode input waveguide D2;

[0045] In embodiment 1, the longitudinal spacing between the multimode input waveguides in the input area and the longitudinal spacing yin between the multimode output waveguides in the output area are equal, two input area tapered couplers and two output area tapered couplings The tapered length ltap of the filter is consistent, and the maximum width wtap of the tapered is equal; the two tapered couplers in the input area are the tapered coupler in the input area E1 and the tapered coupler in the input area E2;

[0046] Specifically, in Example 1, the pitch yin=2.76 μm, the tape...

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Abstract

The invention discloses a silicon-based multimode 3dB beam splitter based on a multimode interference coupler and belongs to the field of an integrated photonic device. The beam splitter particularlycomprises a multimode input waveguide D1, an input region conical coupler E1, a multimode interference waveguide, two output region conical couplers and two multimode output waveguides in sequence from left to right, wherein the multimode input waveguide D1 is used for receiving an input light beam, a longitudinal distance between the multimode input waveguide D1 and the transverse central axis ofthe multimode interference waveguide, and the gradual change length and the gradual change maximum width of the input area conical coupler E1 are adjusted, a low-order guided mode in the multimode interference waveguide is excited, and the longitudinal distance between the multimode output waveguides and the gradual change length and the gradual change maximum width of the output area conical coupler are adjusted so that output light beams are outputted from the two multimode output waveguides. The beam splitter is advantaged in that a multi-mode interference coupler solves a problem that thequality of output light spots is reduced due to excitation of a high-order guided mode under the multi-mode input condition of the multi-mode interference coupler.

Description

technical field [0001] The invention belongs to the field of integrated photonic devices, and more specifically relates to a silicon-based multimode 3dB beam splitter based on a multimode interference coupler. Background technique [0002] In recent years, with the rise and development of artificial intelligence, big data, and cloud computing, people's demand for communication capacity, bandwidth, and speed has exploded. Optical interconnection technology is the most potential way to overcome communication network transmission bottlenecks. Among various optical interconnection schemes, silicon-based optical interconnection technology is considered to be the most promising scheme. Silicon waveguides have a large refractive index difference, and the size of the device structure can be reduced to submicron levels. Therefore, optical devices based on silicon-based micro-nano waveguides have a more compact device structure and can achieve higher density device integration. Optic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/125G02B6/122
CPCG02B6/1228G02B6/125
Inventor 张敏明刘仁福刘德明
Owner HUAZHONG UNIV OF SCI & TECH
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