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Machining technology of ultra-precision part of CVD equipment

A processing technology and ultra-precision technology, applied in welding equipment, metal processing equipment, electron beam welding equipment, etc., can solve problems such as the inability to guarantee ultra-high precision requirements

Inactive Publication Date: 2020-07-14
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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AI Technical Summary

Problems solved by technology

[0002] Existing methods of welding parts cannot guarantee ultra-high precision requirements
The existing technology cannot achieve the flatness and parallelism requirement of 0.01mm; the wall thickness between welds is extremely thin, and the thinnest part is only 1mm-2mm

Method used

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  • Machining technology of ultra-precision part of CVD equipment

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Embodiment Construction

[0015] The following is attached with the manual figure 1 And embodiment the present invention is described in further detail.

[0016] A processing technology plan for ultra-precision parts, which combines precision machining, precision electron beam welding, ultra-high cleanliness cleaning technology, ultra-thick hard anode surface treatment technology and other technologies to complete the manufacture of an ultra-precision part.

[0017] The ultra-precision machining requires 1 pre-welding processing and 2 post-welding processing to ensure the dimensional accuracy of the parts: flatness parallelism 0.01-0.03mm, sealing groove Ra0.4-Ra0.8mm, pin hole position degree 0.03 mm-0.05mm etc.

[0018] The precision electron beam welding needs to complete the welding of one side and one seam first, remove the reinforcement height of 0.5mm-1mm, and then process the second welding chamber for the second welding. Otherwise, the other welds will collapse because the welds interfere wi...

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Abstract

The invention discloses a machining technology of an ultra-precision part. The technology combines a plurality of technologies such as precision machining, precision electron beam welding, an ultra-high cleanliness cleaning technology, and an ultra-thick hard anode surface treatment technology to complete manufacture of the ultra-precision part. According to the technology, a welded part reaches the limit of ultra-high precision requirements, and the wall thickness is 1mm-2 mm.

Description

technical field [0001] The invention relates to the technical field of IC equipment, in particular to a processing technique for ultra-precision parts of CVD equipment. Background technique [0002] The existing methods of welding parts cannot guarantee the ultra-high precision requirements. The existing technology cannot achieve the flatness and parallelism requirement of 0.01mm; the wall thickness between welds is extremely thin, and the thinnest part is only 1mm-2mm. Contents of the invention [0003] The purpose of the invention is to provide a processing technology for ultra-precision parts of CVD equipment. [0004] The technical scheme adopted in the present invention is: [0005] A processing technology for ultra-precision parts, which combines precision machining, precision electron beam welding, ultra-high cleanliness cleaning technology, and ultra-thick hard anode surface treatment technology to complete the manufacture of an ultra-precision part; [0006] Ul...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K15/00C23G1/12C25D11/04C25D11/02B08B3/02B08B3/08
CPCB08B3/02B08B3/08B23K15/0053C23G1/125C25D11/022C25D11/04
Inventor 李文明
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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