Flexible tactile sensor array and preparation method thereof

Abstract

The invention discloses a flexible tactile sensor array and a preparation method thereof. The flexible tactile sensor array comprises a flexible substrate and a tactile sensing array. The tactile sensing array comprises N * M tactile sensing units and an interconnection line network; the tactile sensing unit is a grid-shaped metal foil wrapped and packaged by a conformal polymer, and an in-situ hard micro-column array is integrated on each grid-shaped metal foil; the interconnection line network comprises N row lines and M column lines which are vertically crossed, the row lines and the columnlines are insulated from each other by crossed insulating pads, and the row lines and the column lines are wrapped and packaged by the conformal polymers; and the flexible substrate and the tactile sensing array are bonded into a whole. According to the invention, the in-situ hard micro-column extrusion grid-shaped metal foil structure is constructed according to the mechanism that the resistanceof the metal foil is changed under pressure, and a novel tactile sensor array is constructed by combining the in-situ hard micro-column extrusion grid-shaped metal foil structure as a tactile sensingunit with the interconnection line network; and the novel tactile sensor array has the advantages of high stability, high sensitivity, low hysteresis, high integration level and the like.

Description

technical field [0001] The invention relates to the field of tactile sensors, in particular to a flexible tactile sensor array and a preparation method thereof. Background technique [0002] With the continuous advancement of material science and manufacturing technology, society and industry have put forward new requirements for the functionality, portability and comfort of various electronic devices. Flexibility has become an important development direction of emerging electronic devices. Compared with traditional rigid electronic devices, bendable and deformable devices are important features of flexible devices. They have flexibility, elasticity and the ability to withstand arbitrary deformation. They have shown broad application prospects in the fields of medical assistance, wearable health monitoring and human-computer interaction. . [0003] Flexible tactile sensors can endow robotic hands with a human-like sense of touch, and are the core components for realizing ro...

AI Technical Summary

Problems solved by technology

[0005] Although the existing resistive flexible tactile sensor using flexible pressure-sensitive conductive material as the sensitive unit of the sensor can realize distributed pressure measurement, it has obvious deficiencies in sensitivity, hysteresis and integration; variable contact resistance is used as the sensitive unit The resistive flexible tactile sensor has bottlenecks in range and integration

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