Evaporation boat for vacuum coating machine

A vacuum coating machine and evaporation boat technology, applied in the field of evaporation boats, can solve the problems of low limit temperature, high cost, low material utilization rate, etc., and achieve the effect of increasing the limit temperature and increasing adaptability

Inactive Publication Date: 2020-10-16
苏州瑞康真空科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide an evaporation boat for a vacuum coating machine to solve the problems of high cost, low material utilization rate or low limit temperature in the existing evaporation boat.

Method used

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  • Evaporation boat for vacuum coating machine
  • Evaporation boat for vacuum coating machine
  • Evaporation boat for vacuum coating machine

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Experimental program
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Embodiment Construction

[0022] Such as figure 1 As shown, the evaporation boat used by the vacuum coating machine includes a boat body 1 and heating electrodes 2 positioned at both ends of the boat body 1, and the boat body 1 includes a heating chamber 11 and a feed port 12 positioned at the two ends of the heating chamber 11, and the heating chamber 11 and the feed port 12 are integrally formed or welded. The material thickness of the heating electrode 2 is greater than that of the material wall of the boat body 1. The boat body 1 is made of a metal material with a high melting point, and the metal material with a high melting point includes metal tungsten or titanium alloy.

[0023] The middle part of the wall body of the heating chamber 11 is provided with an interlayer 3, and the interlayer 3 is embedded with an auxiliary heating plate 4. The upper side of the heating chamber 11 is provided with an evaporation boat cover 5, and the two ends of the evaporation boat cover 5 are respectively provided...

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Abstract

The invention provides an evaporation boat for a vacuum coating machine. The evaporation boat comprises a boat body and heating electrodes located at the two ends of the boat body. The boat body comprises a heating cavity and feeding ports located at the two ends of the heating cavity. An interlayer is arranged in the middle of the wall body of the heating cavity, an auxiliary heating piece is embedded in the interlayer, the upper side of the heating cavity is provided with an evaporation boat cover body, the two ends of the evaporation boat cover body are provided with fixing lug towers inserted into the interlayer, and the middle of the evaporation boat cover body is provided with a ventilation hole. The evaporation boat has the advantages of being good in adaptability, controllable in cost and high in efficiency.

Description

technical field [0001] The invention belongs to the technical field of evaporation coating, and in particular relates to an evaporation boat for a vacuum coating machine. Background technique [0002] Evaporation boats have different shapes and shapes, but in the final analysis, they are mainly composed of two parts. A typical evaporation boat is mainly composed of a deep recessed groove in the middle and an electrode connected to an external power supply during heating. When in use, put the evaporation material into the groove, and then fix the electrode on the electrode fixing end of the heating power supply. Since the materials used to make evaporation boats generally use metal materials with high temperature resistance and high resistance, such as tungsten, tantalum, molybdenum, etc., the evaporation boat will generate a lot of heat after a certain current is passed through. When the temperature is high, the evaporation material will be evaporated and deposited on the ...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): C23C14/26
CPCC23C14/26
Inventor陈珂珩
Owner苏州瑞康真空科技有限公司